JPS62164347U - - Google Patents
Info
- Publication number
- JPS62164347U JPS62164347U JP1986052919U JP5291986U JPS62164347U JP S62164347 U JPS62164347 U JP S62164347U JP 1986052919 U JP1986052919 U JP 1986052919U JP 5291986 U JP5291986 U JP 5291986U JP S62164347 U JPS62164347 U JP S62164347U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning liquid
- support shaft
- passage
- liquid injection
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 10
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986052919U JPH0334750Y2 (xx) | 1986-04-09 | 1986-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986052919U JPH0334750Y2 (xx) | 1986-04-09 | 1986-04-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62164347U true JPS62164347U (xx) | 1987-10-19 |
| JPH0334750Y2 JPH0334750Y2 (xx) | 1991-07-23 |
Family
ID=30878511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986052919U Expired JPH0334750Y2 (xx) | 1986-04-09 | 1986-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334750Y2 (xx) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009194167A (ja) * | 2008-02-14 | 2009-08-27 | Tokyo Electron Ltd | 液処理装置 |
| JP2012169572A (ja) * | 2011-02-17 | 2012-09-06 | Tokyo Electron Ltd | 基板洗浄装置 |
| JP2016111302A (ja) * | 2014-12-10 | 2016-06-20 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |
-
1986
- 1986-04-09 JP JP1986052919U patent/JPH0334750Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009194167A (ja) * | 2008-02-14 | 2009-08-27 | Tokyo Electron Ltd | 液処理装置 |
| JP2012169572A (ja) * | 2011-02-17 | 2012-09-06 | Tokyo Electron Ltd | 基板洗浄装置 |
| JP2016111302A (ja) * | 2014-12-10 | 2016-06-20 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0334750Y2 (xx) | 1991-07-23 |