JPS62103247U - - Google Patents
Info
- Publication number
- JPS62103247U JPS62103247U JP19500685U JP19500685U JPS62103247U JP S62103247 U JPS62103247 U JP S62103247U JP 19500685 U JP19500685 U JP 19500685U JP 19500685 U JP19500685 U JP 19500685U JP S62103247 U JPS62103247 U JP S62103247U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- cleaning liquid
- onto
- coating
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19500685U JPS62103247U (xx) | 1985-12-18 | 1985-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19500685U JPS62103247U (xx) | 1985-12-18 | 1985-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62103247U true JPS62103247U (xx) | 1987-07-01 |
Family
ID=31152496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19500685U Pending JPS62103247U (xx) | 1985-12-18 | 1985-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62103247U (xx) |
-
1985
- 1985-12-18 JP JP19500685U patent/JPS62103247U/ja active Pending