JPS62157971U - - Google Patents
Info
- Publication number
- JPS62157971U JPS62157971U JP4254186U JP4254186U JPS62157971U JP S62157971 U JPS62157971 U JP S62157971U JP 4254186 U JP4254186 U JP 4254186U JP 4254186 U JP4254186 U JP 4254186U JP S62157971 U JPS62157971 U JP S62157971U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- rotational position
- position detection
- driving gear
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 10
- 238000001947 vapour-phase growth Methods 0.000 claims 3
- 235000014676 Phragmites communis Nutrition 0.000 claims 1
- 239000000696 magnetic material Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4254186U JPS62157971U (ko) | 1986-03-24 | 1986-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4254186U JPS62157971U (ko) | 1986-03-24 | 1986-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62157971U true JPS62157971U (ko) | 1987-10-07 |
Family
ID=30858549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4254186U Pending JPS62157971U (ko) | 1986-03-24 | 1986-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62157971U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011111651A (ja) * | 2009-11-26 | 2011-06-09 | Sharp Corp | 処理装置、異常検知方法、搬送方法 |
-
1986
- 1986-03-24 JP JP4254186U patent/JPS62157971U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011111651A (ja) * | 2009-11-26 | 2011-06-09 | Sharp Corp | 処理装置、異常検知方法、搬送方法 |
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