JPS62157971U - - Google Patents
Info
- Publication number
- JPS62157971U JPS62157971U JP4254186U JP4254186U JPS62157971U JP S62157971 U JPS62157971 U JP S62157971U JP 4254186 U JP4254186 U JP 4254186U JP 4254186 U JP4254186 U JP 4254186U JP S62157971 U JPS62157971 U JP S62157971U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- rotational position
- position detection
- driving gear
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 10
- 238000001947 vapour-phase growth Methods 0.000 claims 3
- 235000014676 Phragmites communis Nutrition 0.000 claims 1
- 239000000696 magnetic material Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図ないし第３図は本考案の一実施例を示し
第１図は断面図、第２図はサセプタの平面図、第
３図はエンコーダと検知機構の信号ならびにサセ
プタの回転速度を示す線図、第４図は本考案の他
の実施例における要部の断面図である。
１５……サセプタ、２４，２４Ａ……サセプタ
駆動用歯車、２７……エンコーダ、２８……電動
示、３２，５１……指標、３４，５２……検知機
構。
Figures 1 to 3 show one embodiment of the present invention, Figure 1 is a sectional view, Figure 2 is a plan view of the susceptor, and Figure 3 is a line showing signals from the encoder and detection mechanism as well as the rotational speed of the susceptor. 4 are sectional views of essential parts in another embodiment of the present invention. 15... Susceptor, 24, 24A... Susceptor driving gear, 27... Encoder, 28... Electric indicator, 32, 51... Index, 34, 52... Detection mechanism.
Claims (1)
回転位置検出用の指標と、前記サセプタ駆動用歯
車を囲むハウジング外部に設けられ前記指標が所
定回転位置に達したことを検知する検知機構と、
前記サセプタを回転させる電動機に取り付けられ
前記サセプタの１回転内の所定角度位置毎に０信
号を発するエンコーダとからなる気相成長装置の
サセプタ回転位置検出装置。 ２ 回転位置検出用指標としてマグネツト或いは
磁性材料を使用し、検知機構としてリードスイツ
チを使用したことを特徴とする特許請求の範囲第
１項記載の気相成長装置のサセプタ回転位置検出
装置。 ３ 回転位置検出用指標としてサセプタ駆動用歯
車に穴をあけ、検知機構として光学センサを使用
したことを特徴とする特許請求の範囲第１項記載
の気相成長装置のサセプタ回転位置検出装置。[Claims for Utility Model Registration] 1. An indicator provided on a susceptor driving gear for detecting the rotational position of the susceptor, and an indicator provided on the outside of a housing surrounding the susceptor driving gear to detect when the indicator has reached a predetermined rotational position. a detection mechanism to detect;
A susceptor rotational position detection device for a vapor phase growth apparatus, comprising an encoder attached to an electric motor that rotates the susceptor and outputting a 0 signal at every predetermined angular position within one rotation of the susceptor. 2. The susceptor rotational position detection device for a vapor phase growth apparatus according to claim 1, wherein a magnet or a magnetic material is used as the rotational position detection index, and a reed switch is used as the detection mechanism. 3. The susceptor rotational position detection device for a vapor phase growth apparatus according to claim 1, wherein a hole is bored in the susceptor driving gear as a rotational position detection index, and an optical sensor is used as the detection mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4254186U JPS62157971U (en) | 1986-03-24 | 1986-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4254186U JPS62157971U (en) | 1986-03-24 | 1986-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62157971U true JPS62157971U (en) | 1987-10-07 |
Family
ID=30858549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4254186U Pending JPS62157971U (en) | 1986-03-24 | 1986-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62157971U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011111651A (en) * | 2009-11-26 | 2011-06-09 | Sharp Corp | Processor, abnormality detection method and conveying method |
-
1986
- 1986-03-24 JP JP4254186U patent/JPS62157971U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011111651A (en) * | 2009-11-26 | 2011-06-09 | Sharp Corp | Processor, abnormality detection method and conveying method |
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