JPS6215763U - - Google Patents

Info

Publication number
JPS6215763U
JPS6215763U JP10679685U JP10679685U JPS6215763U JP S6215763 U JPS6215763 U JP S6215763U JP 10679685 U JP10679685 U JP 10679685U JP 10679685 U JP10679685 U JP 10679685U JP S6215763 U JPS6215763 U JP S6215763U
Authority
JP
Japan
Prior art keywords
sample holder
chamber
sample
preliminary chamber
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10679685U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0357000Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985106796U priority Critical patent/JPH0357000Y2/ja
Publication of JPS6215763U publication Critical patent/JPS6215763U/ja
Application granted granted Critical
Publication of JPH0357000Y2 publication Critical patent/JPH0357000Y2/ja
Expired legal-status Critical Current

Links

JP1985106796U 1985-07-12 1985-07-12 Expired JPH0357000Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985106796U JPH0357000Y2 (enExample) 1985-07-12 1985-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985106796U JPH0357000Y2 (enExample) 1985-07-12 1985-07-12

Publications (2)

Publication Number Publication Date
JPS6215763U true JPS6215763U (enExample) 1987-01-30
JPH0357000Y2 JPH0357000Y2 (enExample) 1991-12-25

Family

ID=30982486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985106796U Expired JPH0357000Y2 (enExample) 1985-07-12 1985-07-12

Country Status (1)

Country Link
JP (1) JPH0357000Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014069325A1 (ja) * 2012-10-31 2014-05-08 株式会社日立ハイテクノロジーズ 電子ビーム顕微装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4836763U (enExample) * 1971-08-27 1973-05-02
JPS5324246U (enExample) * 1976-08-09 1978-03-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4836763U (enExample) * 1971-08-27 1973-05-02
JPS5324246U (enExample) * 1976-08-09 1978-03-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014069325A1 (ja) * 2012-10-31 2014-05-08 株式会社日立ハイテクノロジーズ 電子ビーム顕微装置

Also Published As

Publication number Publication date
JPH0357000Y2 (enExample) 1991-12-25

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