JPS6215632B2 - - Google Patents
Info
- Publication number
- JPS6215632B2 JPS6215632B2 JP5969281A JP5969281A JPS6215632B2 JP S6215632 B2 JPS6215632 B2 JP S6215632B2 JP 5969281 A JP5969281 A JP 5969281A JP 5969281 A JP5969281 A JP 5969281A JP S6215632 B2 JPS6215632 B2 JP S6215632B2
- Authority
- JP
- Japan
- Prior art keywords
- container
- plating
- steel strip
- thickness
- evaporation source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007747 plating Methods 0.000 claims description 48
- 238000001704 evaporation Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 24
- 230000008020 evaporation Effects 0.000 claims description 21
- 238000005192 partition Methods 0.000 claims description 12
- 229910000831 Steel Inorganic materials 0.000 description 30
- 239000010959 steel Substances 0.000 description 30
- 238000009826 distribution Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000032258 transport Effects 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 239000004566 building material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5969281A JPS57174458A (en) | 1981-04-22 | 1981-04-22 | Construction of vessel for evaporating source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5969281A JPS57174458A (en) | 1981-04-22 | 1981-04-22 | Construction of vessel for evaporating source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57174458A JPS57174458A (en) | 1982-10-27 |
| JPS6215632B2 true JPS6215632B2 (de) | 1987-04-08 |
Family
ID=13120513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5969281A Granted JPS57174458A (en) | 1981-04-22 | 1981-04-22 | Construction of vessel for evaporating source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57174458A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH062942B2 (ja) * | 1983-07-18 | 1994-01-12 | 三菱重工業株式会社 | 真空蒸着装置 |
| JPH0635656B2 (ja) * | 1986-10-03 | 1994-05-11 | 三菱重工業株式会社 | 真空蒸着装置 |
| JPS63135963U (de) * | 1987-02-23 | 1988-09-07 |
-
1981
- 1981-04-22 JP JP5969281A patent/JPS57174458A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57174458A (en) | 1982-10-27 |
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