JPS62156261A - 加熱酸化による酸化イリジウム膜の製造方法 - Google Patents

加熱酸化による酸化イリジウム膜の製造方法

Info

Publication number
JPS62156261A
JPS62156261A JP60298123A JP29812385A JPS62156261A JP S62156261 A JPS62156261 A JP S62156261A JP 60298123 A JP60298123 A JP 60298123A JP 29812385 A JP29812385 A JP 29812385A JP S62156261 A JPS62156261 A JP S62156261A
Authority
JP
Japan
Prior art keywords
film
iridium
oxide film
iridium oxide
thermal oxidation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60298123A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6257707B2 (enExample
Inventor
Yoshiyuki Sato
義幸 佐藤
Koichi Ono
小野　耕一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Sakura Color Products Corp
Original Assignee
Agency of Industrial Science and Technology
Sakura Color Products Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Sakura Color Products Corp filed Critical Agency of Industrial Science and Technology
Priority to JP60298123A priority Critical patent/JPS62156261A/ja
Publication of JPS62156261A publication Critical patent/JPS62156261A/ja
Publication of JPS6257707B2 publication Critical patent/JPS6257707B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
JP60298123A 1985-12-27 1985-12-27 加熱酸化による酸化イリジウム膜の製造方法 Granted JPS62156261A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60298123A JPS62156261A (ja) 1985-12-27 1985-12-27 加熱酸化による酸化イリジウム膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60298123A JPS62156261A (ja) 1985-12-27 1985-12-27 加熱酸化による酸化イリジウム膜の製造方法

Publications (2)

Publication Number Publication Date
JPS62156261A true JPS62156261A (ja) 1987-07-11
JPS6257707B2 JPS6257707B2 (enExample) 1987-12-02

Family

ID=17855470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60298123A Granted JPS62156261A (ja) 1985-12-27 1985-12-27 加熱酸化による酸化イリジウム膜の製造方法

Country Status (1)

Country Link
JP (1) JPS62156261A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5798134A (en) * 1994-10-11 1998-08-25 Agency Of Industrial Science & Technology Process for producing nickel oxide film
US20100000673A1 (en) * 2006-08-02 2010-01-07 Ulvac, Inc. Film forming method and film forming apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0552203U (ja) * 1991-12-20 1993-07-13 株式会社クボタ エンジンの吸排気弁装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5798134A (en) * 1994-10-11 1998-08-25 Agency Of Industrial Science & Technology Process for producing nickel oxide film
US20100000673A1 (en) * 2006-08-02 2010-01-07 Ulvac, Inc. Film forming method and film forming apparatus

Also Published As

Publication number Publication date
JPS6257707B2 (enExample) 1987-12-02

Similar Documents

Publication Publication Date Title
KR100649838B1 (ko) 투명한 전도성 적층물 및 이의 제조방법
US5030331A (en) Process for preparing iridium oxide film
US20180014359A1 (en) Heating device, in particular a semi-transparent heating device
CA1124379A (en) Iridium oxide based electrochromic devices
Kaplan et al. Annealing and Sb-doping of Sn—O films produced by filtered vacuum arc deposition: Structure and electro-optical properties
Kumar et al. On ion transport during the electrochemical reaction on plane and GLAD deposited WO3 thin films
Uen et al. Preparation and characterization of some tin oxide films
JPH0350148A (ja) 酸化亜鉛焼結体及びその製造法並びに用途
Ryabova et al. Preparation and properties of pyrolysis of vanadium oxide films
Madhuri et al. Physical investigations on electron beam evaporated V2O5–MoO3 thin films
JPS6257707B2 (enExample)
US4965142A (en) Molybdenum-platinum-oxide electrodes for thermoelectric generators
Girtan et al. The influence of preparation conditions on the electrical and optical properties of oxidized indium thin films
JPH02163363A (ja) 透明導電膜の製造方法
JPS62103622A (ja) 金属酸化物薄膜の製造法
JPH0254755A (ja) 透明導電膜の製造方法
US5798134A (en) Process for producing nickel oxide film
JP2642884B2 (ja) 加熱酸化による酸化ニッケル膜の製造方法
JPH0892766A (ja) プラズマ酸化による酸化ニッケル膜の製造方法
Novodvorsky et al. Low-temperature laser synthesis of thin electrochromic WO3 films
JPS5945429A (ja) エレクトロクロミツク素子
Parshina et al. PLD of thin electrochromic WO3 films at room temperature
JPH0444812B2 (enExample)
Acosta-Rivera et al. Low Temperature Formation of Crystalline VO2 Domains in Porous 1 Nanocolumnar Thin Films for Thermochromic Applications
JPS63241805A (ja) 透明導電性膜の製造方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term