JPS6215541Y2 - - Google Patents
Info
- Publication number
- JPS6215541Y2 JPS6215541Y2 JP1982169545U JP16954582U JPS6215541Y2 JP S6215541 Y2 JPS6215541 Y2 JP S6215541Y2 JP 1982169545 U JP1982169545 U JP 1982169545U JP 16954582 U JP16954582 U JP 16954582U JP S6215541 Y2 JPS6215541 Y2 JP S6215541Y2
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- sliding
- air
- sliding shaft
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16954582U JPS5972316U (ja) | 1982-11-09 | 1982-11-09 | 静圧軸受 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16954582U JPS5972316U (ja) | 1982-11-09 | 1982-11-09 | 静圧軸受 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5972316U JPS5972316U (ja) | 1984-05-16 |
| JPS6215541Y2 true JPS6215541Y2 (instruction) | 1987-04-20 |
Family
ID=30370373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16954582U Granted JPS5972316U (ja) | 1982-11-09 | 1982-11-09 | 静圧軸受 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5972316U (instruction) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005331048A (ja) * | 2004-05-20 | 2005-12-02 | Imv Corp | 防振x−yテーブル |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6210486Y2 (instruction) * | 1978-01-13 | 1987-03-12 | ||
| JPS55126117A (en) * | 1979-03-22 | 1980-09-29 | Hitachi Ltd | Main rotary shaft unit |
-
1982
- 1982-11-09 JP JP16954582U patent/JPS5972316U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5972316U (ja) | 1984-05-16 |
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