JPS62154798A - Manufacturing apparatus of printed wiring board - Google Patents

Manufacturing apparatus of printed wiring board

Info

Publication number
JPS62154798A
JPS62154798A JP29476585A JP29476585A JPS62154798A JP S62154798 A JPS62154798 A JP S62154798A JP 29476585 A JP29476585 A JP 29476585A JP 29476585 A JP29476585 A JP 29476585A JP S62154798 A JPS62154798 A JP S62154798A
Authority
JP
Japan
Prior art keywords
printed circuit
circuit board
vibration
carrier bar
processing liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29476585A
Other languages
Japanese (ja)
Other versions
JPH0362315B2 (en
Inventor
敏之 大西
篤 松本
正幸 新浪
友美智 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plantex Ltd
PlantX Corp
Original Assignee
Plantex Ltd
PlantX Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plantex Ltd, PlantX Corp filed Critical Plantex Ltd
Priority to JP29476585A priority Critical patent/JPS62154798A/en
Publication of JPS62154798A publication Critical patent/JPS62154798A/en
Publication of JPH0362315B2 publication Critical patent/JPH0362315B2/ja
Granted legal-status Critical Current

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  • Electroplating Methods And Accessories (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、プリント基板におけるスルーホールにメンキ
層を形成するプリント基板製造装置に関し、特にプリン
ト基板のスルーホールメッキ前処理装置のほか、無電解
メッキ装訝や電気メツキ装置などに適用可能なものであ
る。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a printed circuit board manufacturing device that forms a coating layer on through holes in a printed circuit board. It can be applied to plating equipment, electroplating equipment, etc.

(従来の技術) プリント基板のスルーホールを形成するにはプレスやド
リルで基板に孔をあけたのち、メッキ槽に浸漬して、孔
の内周に無電解メッキを施す。
(Prior art) To form through holes in printed circuit boards, holes are made in the board using a press or drill, and then the board is immersed in a plating bath to electroless plate the inner periphery of the holes.

(発明が解決しようとする問題点) ところが、近年、プリント基板の高密度化、多層化がい
っそう進んで板厚が厚くなる一方、スルーホールの孔径
が小さくなり、孔径と孔の長さの比であるアスペクト比
が大きくなってきている。そのため、高密度化、多層化
された多層板の小径スルーホールにおけるメッキ処理な
どの各種液体処理工程において、基板全体を液体中に挿
入してもスルーホール中に気泡が残って孔の内周に液が
浸漬しないことがあり、この気泡に起因するプリント基
板の製造不良が問題となっている。
(Problem to be solved by the invention) However, in recent years, printed circuit boards have become more dense and multi-layered, resulting in thicker boards, while the diameter of through holes has become smaller, and the ratio between the hole diameter and hole length has become smaller. The aspect ratio is becoming larger. Therefore, in various liquid processing processes such as plating in small-diameter through-holes of high-density, multilayer boards, even if the entire board is inserted into the liquid, air bubbles remain in the through-holes and form on the inner periphery of the holes. The liquid may not be immersed, and manufacturing defects of printed circuit boards caused by these bubbles have become a problem.

そこで、本発明の目的は、上述の点に鑑み、高密度化、
多層化された多層板の小径スルーホールの気泡を完全に
除去するようにし、その気泡に起因するプリント基板の
製造不良を防止することにある。
Therefore, in view of the above-mentioned points, an object of the present invention is to increase density,
To completely remove air bubbles from small-diameter through holes in a multilayer board, and to prevent manufacturing defects in printed circuit boards caused by the air bubbles.

(問題点を解決するための手段) かかる目的を達成するために、本発明は、スルーホール
を有するプリント基板を懸吊部材に連結すると共に、該
懸吊部材の両端部を処理液槽の左右に設けた支持部材の
上に載置して前記プリント基板を処理液槽内に懸下し、
しかして前記支持部材に磁石を取付は前記懸吊部材を吸
着すると共に、前記支持部材に振動発生器を併設して前
記プリント基板を上下に振動するようにして成るもので
ある。
(Means for Solving the Problems) In order to achieve the above object, the present invention connects a printed circuit board having a through hole to a suspension member, and connects both ends of the suspension member to the left and right sides of a processing liquid tank. placing the printed circuit board on a support member provided in the processing liquid tank;
The magnet is attached to the support member so as to attract the suspension member, and a vibration generator is attached to the support member to vibrate the printed circuit board up and down.

(作用) すなわち、本発明は、処理液槽内に浸漬されて液体処理
中のプリント基板をその板面に沿う上下方向に振動させ
るとともに、その際に、振動源からの振動をプリント基
板に確実に伝達できるようにし、スルーホール中の気泡
を完全に除去するようにしたものである。
(Function) That is, the present invention vibrates a printed circuit board that is immersed in a processing liquid tank and is undergoing liquid treatment in the vertical direction along the board surface, and at the same time, ensures that the vibration from the vibration source is applied to the printed circuit board. It is designed to completely eliminate air bubbles in the through-hole.

(実施例) 以下、図面を参照して本発明の詳細な説明する。(Example) Hereinafter, the present invention will be described in detail with reference to the drawings.

第1図は本発明の第1実施例をプリント基板の製造工程
ラインに適用した概略斜視図である。
FIG. 1 is a schematic perspective view of a first embodiment of the present invention applied to a manufacturing process line for printed circuit boards.

図において、1および2はそれぞれプリント基板3を製
造する際に、メッキ処理などの液体処理を行う各種の処
理液槽である。プリント基板3は、スルーホール4を有
するとともに、多層化されたものである。
In the figure, numerals 1 and 2 are various processing liquid tanks that perform liquid processing such as plating processing when manufacturing the printed circuit board 3, respectively. The printed circuit board 3 has through holes 4 and is multilayered.

処理液槽1および2の配列方向には、その配列方向の左
右に沿って1対のキャリヤバー受け5.5をそれぞれ配
置する。そして、その各処理液槽1および2の入口にお
ける左右両端のギヤリヤバー受け5,5上に、左右1対
の振動発生器6.6をそれぞれ配置する。
In the arrangement direction of the processing liquid tanks 1 and 2, a pair of carrier bar receivers 5.5 are respectively arranged along the left and right sides of the arrangement direction. A pair of left and right vibration generators 6.6 are arranged on the gear rear bar receivers 5, 5 at both left and right ends at the inlet of each processing liquid tank 1 and 2, respectively.

7は懸吊部材としてのキャリヤバーであり、左右1対の
クリップ8.8を介してプリン12Ji板3を吊すとと
もに、その左右両端に振動発生器6.6の対応する7字
受け9.9と嵌合する7字部10.10を形成する。
Reference numeral 7 designates a carrier bar as a suspension member, which suspends the Pudding 12Ji board 3 via a pair of left and right clips 8.8, and has a corresponding figure 7 receiver 9.9 of the vibration generator 6.6 at both left and right ends of the carrier bar. A figure 7 portion 10.10 is formed to fit with the 7-shaped portion 10.10.

ここで、キャリヤバー7と7字受け9との結合力を高め
るため、キャリヤバー7の7字部10と7字受け9とを
第2図に示すように構成する。
Here, in order to increase the bonding force between the carrier bar 7 and the figure 7 receiver 9, the figure 7 portion 10 of the carrier bar 7 and the figure 7 receiver 9 are constructed as shown in FIG.

すなわち、7字部10は、その傾斜面に鉄板などの磁性
体からなる吸着板10A、IOAを固着し、さらにその
吸着板10A、IOAの各表面に耐食性プラスチックを
被膜する。また、7字受け9は、その傾斜部に7字部1
0の吸着板10A。
That is, in the figure 7 part 10, the suction plates 10A and IOA made of a magnetic material such as an iron plate are fixed to the inclined surface thereof, and the surfaces of the suction plates 10A and IOA are coated with corrosion-resistant plastic. In addition, the character 7 receiver 9 has a character 7 part 1 on its inclined part.
0 suction plate 10A.

10Aを吸着するための電磁石9A、9Aを固着し、こ
の″1rL81石9A、9Aの各表面に耐食性プラスチ
ックを被膜する。従って、第2図の状態で電磁石9A、
9Aを通電すると、電磁石9A、9Aによって吸着板1
0A、IOAが吸着されるので、キャリヤバー7と7字
受け9が強固に結合される。
Electromagnets 9A, 9A for adsorbing 10A are fixed, and each surface of these "1rL81 stones 9A, 9A is coated with corrosion-resistant plastic. Therefore, in the state shown in FIG. 2, the electromagnets 9A,
When 9A is applied, the electromagnets 9A and 9A cause the adsorption plate 1 to
Since 0A and IOA are absorbed, the carrier bar 7 and the figure 7 receiver 9 are firmly connected.

なお、上述の電磁石9Aに代えて、吸着板lOAを永久
磁石の極性の切換えにより吸着あるいは反発させるよう
にしてもよい。
Note that instead of the electromagnet 9A described above, the attraction plate lOA may be made to attract or repel by changing the polarity of a permanent magnet.

また、キャリヤバー7は、搬送装置(図示せず)の搬送
杆11に案内されて各処理液槽1および2の配列方向に
移動可能にするとともに、各処理液槽1および2の頭上
の位置で上昇および下降でき、その下降のときには、キ
ャリヤバー7の7字部10が対応する7字受け9,9に
嵌合すると、その位置にキャリヤバー7が位匠決め固定
できるようにする。
Further, the carrier bar 7 is guided by a transport rod 11 of a transport device (not shown) to be movable in the arrangement direction of each processing liquid tank 1 and 2, and is positioned above the head of each processing liquid tank 1 and 2. When the carrier bar 7 is lowered, the carrier bar 7 can be positioned and fixed at that position when the figure 7 part 10 of the carrier bar 7 fits into the corresponding figure 7 receivers 9, 9.

次に、第1図で示した振動発生器について第3図を参照
して説明する。
Next, the vibration generator shown in FIG. 1 will be explained with reference to FIG. 3.

図において、12.12は1対のスプリングであり、そ
の下端をキヤリヤバー受け5上にそれぞれ固定するとと
もに、その上端を振動板13の下面両端にそれぞれ固定
し、振動板13をキャリヤバー受け5上に弾性支持する
。さらに、キャリヤバー受け5上に弾性支持された振動
板13上に7字受け9を固定する。
In the figure, reference numerals 12 and 12 indicate a pair of springs, the lower ends of which are fixed on the carrier bar receiver 5, and the upper ends of which are respectively fixed on both ends of the lower surface of the diaphragm 13, so that the diaphragm 13 is fixed on the carrier bar receiver 5. Provides elastic support. Furthermore, the figure 7 receiver 9 is fixed on the diaphragm 13 which is elastically supported on the carrier bar receiver 5.

14は振動板13を所定の振動数で振動させる振動源と
しての振動モータであり、振動板13の下面に固定し、
この振動モータ14が回転すると、そのモータ軸の両端
に固定されたアンバランスウェイトによって、振動板1
3が1対のスブリング12.12の弾性支持に抗して上
下方向に振動するように構成する。
14 is a vibration motor as a vibration source that vibrates the diaphragm 13 at a predetermined frequency, and is fixed to the lower surface of the diaphragm 13;
When this vibration motor 14 rotates, unbalanced weights fixed to both ends of the motor shaft cause the diaphragm 1
3 is configured to vibrate in the vertical direction against the elastic support of a pair of subrings 12 and 12.

この振動板13は、振動モータ14が1回転すると1振
動し、その振動数は例えば50回/分〜3000回/分
の範囲が好ましく、特に800回/分〜900回/分が
好ましい、また、その振幅は例えば1.Om+a〜 1
.8mmが好適である。
This diaphragm 13 vibrates once when the vibration motor 14 rotates once, and the frequency thereof is preferably in the range of, for example, 50 times/min to 3000 times/min, particularly preferably 800 times/min to 900 times/min. , its amplitude is, for example, 1. Om+a~ 1
.. 8 mm is suitable.

また、振動板13の振動源としては、上述の振動モータ
13に代えて、いわゆる?1を磁式バイブレータを用い
てもよい。
Moreover, as a vibration source for the diaphragm 13, instead of the above-mentioned vibration motor 13, a so-called ? A magnetic vibrator may be used for 1.

次に、このように構成される第1実施例の動作について
説明する。ここで、処理液槽1を例えば無電解メッキを
行うメッキ槽とする。
Next, the operation of the first embodiment configured as described above will be explained. Here, the processing liquid tank 1 is, for example, a plating tank that performs electroless plating.

いま、プリント基板3が前工程処理を終了し、搬送装置
の搬送杆11に案内されて第1図に示す処理液槽1の頭
上に到来すると、その位置でキャリヤバー7が下降する
。そして、キャリヤバー7が下降してその左右両端に形
成した7字部1O110が対応する7字受け9.9に嵌
合して位置決め固定されると、搬送杆11はキャリヤバ
ー7の支持を止めて上方の所定位置に戻る。
Now, when the printed circuit board 3 has finished its pre-processing process and is guided by the transport rod 11 of the transport device and arrives above the processing liquid tank 1 shown in FIG. 1, the carrier bar 7 is lowered at that position. When the carrier bar 7 is lowered and the 7-shaped portions 1O110 formed at both left and right ends are fitted into the corresponding 7-shaped receivers 9.9 and fixed in position, the transport rod 11 stops supporting the carrier bar 7. to return to the specified position above.

ここで、キャリヤバー7に吊されたプリント基板3は、
処理液槽1の液中に完全に浸漬されるとともに、電磁石
9A、9Aが通電され、その電磁石9A、9Aと7字部
10の吸看板10Aとが吸着するので、キャリヤバー7
が7字受け9に強固に結合される。
Here, the printed circuit board 3 suspended on the carrier bar 7 is
The carrier bar 7 is completely immersed in the liquid in the processing liquid tank 1, and the electromagnets 9A, 9A are energized, and the electromagnets 9A, 9A and the suction plate 10A of the figure 7 portion 10 are attracted to each other.
is firmly connected to the 7-character receiver 9.

次に、処理液槽lの左右両端に配置した1対の振動発生
器6.6における振動モータ14がそれぞれ動作を開始
するので、それぞれ振動板13が上下方向に振動を開始
する。そして、この振動板13の振動は、7字受け9、
ギヤリヤバー7を経由してプリント基板3に伝達される
ので、プリント基板3が上下方向の振動を開始する。こ
のとき、キャリヤバー7が7字受け9に強固に電磁力に
よって結合されているので、振動板13の振動は、プリ
ント基板3に確実に伝達される。
Next, the vibration motors 14 in the pair of vibration generators 6.6 disposed at both left and right ends of the processing liquid tank 1 start operating, so that the diaphragms 13 start vibrating in the vertical direction. The vibration of this diaphragm 13 is caused by the 7-character receiver 9,
Since the vibration is transmitted to the printed circuit board 3 via the gear rear bar 7, the printed circuit board 3 starts vibrating in the vertical direction. At this time, since the carrier bar 7 is firmly coupled to the figure 7 receiver 9 by electromagnetic force, the vibration of the diaphragm 13 is reliably transmitted to the printed circuit board 3.

そして、処理液槽l内の無電解メッキ液が所定温度を越
えると触媒作用により液分解を起こし、これによりスル
ーホール4の内面にメッキ層カ形成されていく。
When the electroless plating solution in the processing solution tank 1 exceeds a predetermined temperature, the solution decomposes due to catalytic action, thereby forming a plating layer on the inner surface of the through hole 4.

このスルーホール4のメッキ層の形成過程において、プ
リント基板3は上述のよ・うに常時上下方向に振動して
いるので、この振動によってスルーホール中の気泡やス
ルーホール中に発生する気泡が完全に除去できる。その
ため、プリント基板3の有する全てのスルーホールの内
面に所定のメッキ層が確実に形成される。
In the process of forming the plating layer of the through hole 4, the printed circuit board 3 is constantly vibrating vertically as described above, so this vibration completely eliminates the air bubbles in the through hole and the air bubbles generated in the through hole. Can be removed. Therefore, a predetermined plating layer is reliably formed on the inner surfaces of all the through holes of the printed circuit board 3.

その後、スルーホールの形成が終了すると、電磁石9A
、9Aに対する通電が解かれるとともに、搬送杆11が
再び下降してきて、キャリヤバー7に一体のプリント基
板3が処理液槽1から引き上げられ、次の処理工程に進
む。
After that, when the formation of the through hole is completed, the electromagnet 9A
, 9A is de-energized, the transport rod 11 descends again, and the printed circuit board 3 integrated with the carrier bar 7 is lifted out of the processing liquid tank 1 to proceed to the next processing step.

なお、上述の動作例はメッキ処理について説明したが、
本発明はこれに限定されることなく、例えばプリント基
板のメッキに関する前処理や後処理などの各種液体処理
装置の他、電気メツキ装置などにも適用可能であること
勿論である。
Note that the above operation example describes plating processing, but
The present invention is not limited thereto, and can of course be applied to various liquid processing apparatuses for pre-processing and post-processing for plating printed circuit boards, as well as electroplating apparatuses.

次に、本発明の第2実施例について第4図を参照して説
明する。なお、第1図と同様の部分には同一符号を付し
てその詳細な説明を省略する。
Next, a second embodiment of the present invention will be described with reference to FIG. Note that the same parts as in FIG. 1 are denoted by the same reference numerals, and detailed explanation thereof will be omitted.

第2実施例は、プリント基板3を複数枚一括処理できる
ように、プリント基板3が所定間隔毎に収容できる処理
かご15を、キャリヤバー7に吊すようにしたものであ
る。
In the second embodiment, a processing basket 15 that can accommodate printed circuit boards 3 at predetermined intervals is hung on a carrier bar 7 so that a plurality of printed circuit boards 3 can be processed at once.

このような構成において、いま処理液槽1を第1実施例
と同様にメッキ槽とすれば、メッキ処理作業のときには
、第5図で示すように処理かご15内におさめられてい
る複数のプリント基板3が処理液槽1内に一括して収容
される。そして、メンキ処理中は、第1実施例と同様に
振動発生器6.6からの振動が複数のプリント基板3に
それぞれ伝達される。このとき、キャリヤバー7が7字
受け9に電磁力によって強固に結合されて振動板13の
振動がプリント基板3に確実に伝達されるので、その振
動によってスルーホール中の気泡を完全に除去できる。
In such a configuration, if the processing liquid tank 1 is now used as a plating tank as in the first embodiment, during the plating process, a plurality of prints stored in the processing basket 15 are stored in the processing basket 15 as shown in FIG. The substrates 3 are housed in the processing liquid tank 1 all at once. During the cleaning process, vibrations from the vibration generator 6.6 are transmitted to each of the plurality of printed circuit boards 3, as in the first embodiment. At this time, the carrier bar 7 is firmly coupled to the figure 7 receiver 9 by electromagnetic force, and the vibration of the diaphragm 13 is reliably transmitted to the printed circuit board 3, so that the air bubbles in the through-hole can be completely removed by the vibration. .

(発明の効果) 以上説明したように3本発明によれば、処理液槽内に浸
漬されて液体処理中のプリントu板を、処理液槽の左右
に配置した振動発生器からの振動によりその板面に沿う
上下方向に振動させるとともに、その際に、振動源から
の振動をプリント基板に確実に伝達できるようにし、ス
ルーホール中の気泡を完全に除去するようにしたので、
各種の液体処理が完全になり、その気泡に起因するプリ
ント基板の製造不良を防止することができる。
(Effects of the Invention) As explained above, according to the present invention, a printed U-board immersed in a processing liquid tank and undergoing liquid treatment is vibrated by vibrations from vibration generators disposed on the left and right sides of the processing liquid tank. In addition to vibrating in the vertical direction along the board surface, we ensured that the vibration from the vibration source was transmitted to the printed circuit board and completely removed air bubbles in the through holes.
Various liquid treatments are completed, and manufacturing defects of printed circuit boards due to bubbles can be prevented.

また、本発明はすでに述べたようにプリント基板が振動
するので、プリント基板が浸漬されて処理される各処理
液の寿命がのびるとともに、スルーホール中のスミア(
スルーホールの穴あけ時に発生する切り粉)等が容易に
離脱するので、スミアによるメツキネ良も皆無となる。
In addition, since the printed circuit board of the present invention vibrates as described above, the life of each processing liquid in which the printed circuit board is immersed is extended, and smear in the through hole (
Chips generated when drilling through-holes are easily removed, so there is no chance of defects caused by smear.

さらに、本発明を銅メッキ工程で使用するときには、銅
析出時に発生する水素ガスの微細気泡がプリント基板の
振動により早く離脱するので、銅の特性(伸び率や引張
り強さ)が格段に向上する。
Furthermore, when the present invention is used in the copper plating process, the fine bubbles of hydrogen gas generated during copper deposition are quickly released by the vibration of the printed circuit board, so the properties of copper (elongation rate and tensile strength) are significantly improved. .

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の第1実施例の斜視図、第2図は7字受
けと7字部の各構成を示す断面図、第3図は振動装置の
概略構成図、第4図は第2実施例の斜視図、第5図はそ
の断面図である。 1.2は処理液槽、3はプリント基板、4はスルーホー
ル、5はキャリヤバー受け、6は振動発生器、7はキャ
リヤバー、13は振動板、14は振動モータ。 特許出願人  株式会社プランテックス代理人    
牧 舌部(ほか2名) 第1図
Fig. 1 is a perspective view of the first embodiment of the present invention, Fig. 2 is a sectional view showing the structure of the figure 7 receiver and the figure 7 part, Fig. 3 is a schematic configuration diagram of the vibrating device, and Fig. 4 is the structure of the vibration device. A perspective view of the second embodiment, and FIG. 5 is a sectional view thereof. 1.2 is a processing liquid tank, 3 is a printed circuit board, 4 is a through hole, 5 is a carrier bar receiver, 6 is a vibration generator, 7 is a carrier bar, 13 is a diaphragm, and 14 is a vibration motor. Patent applicant Plantex Co., Ltd. Agent
Maki Tobe (and 2 others) Figure 1

Claims (1)

【特許請求の範囲】 1)スルーホールを有するプリント基板を懸吊部材に連
結すると共に、該懸吊部材の両端部を処理液槽の左右に
設けた支持部材の上に載置して前記プリント基板を処理
液槽内に懸下し、しかして前記支持部材に磁石を取付け
前記懸吊部材を吸着すると共に、前記支持部材に振動発
生器を併設して前記プリント基板を上下に振動するよう
にして成るプリント基板製造装置。 2)前記磁石は、励磁と消磁とを切換え可能にした特許
請求の範囲第1項記載のプリント基板製造装置。
[Scope of Claims] 1) A printed circuit board having a through-hole is connected to a suspension member, and both ends of the suspension member are placed on support members provided on the left and right sides of a processing liquid tank. The substrate is suspended in a processing liquid tank, and a magnet is attached to the support member to attract the suspension member, and a vibration generator is attached to the support member to vibrate the printed circuit board up and down. Printed circuit board manufacturing equipment consisting of 2) The printed circuit board manufacturing apparatus according to claim 1, wherein the magnet can be switched between excitation and demagnetization.
JP29476585A 1985-12-27 1985-12-27 Manufacturing apparatus of printed wiring board Granted JPS62154798A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29476585A JPS62154798A (en) 1985-12-27 1985-12-27 Manufacturing apparatus of printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29476585A JPS62154798A (en) 1985-12-27 1985-12-27 Manufacturing apparatus of printed wiring board

Publications (2)

Publication Number Publication Date
JPS62154798A true JPS62154798A (en) 1987-07-09
JPH0362315B2 JPH0362315B2 (en) 1991-09-25

Family

ID=17812007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29476585A Granted JPS62154798A (en) 1985-12-27 1985-12-27 Manufacturing apparatus of printed wiring board

Country Status (1)

Country Link
JP (1) JPS62154798A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311061U (en) * 1989-06-19 1991-02-01
JPH04103195A (en) * 1990-08-22 1992-04-06 Toppan Printing Co Ltd Manufacturing device of small diameter through-hole printed wiring board
WO2011105072A1 (en) * 2010-02-24 2011-09-01 住友ベークライト株式会社 Substrate treating method and substrate treating apparatus
JP2012082447A (en) * 2010-10-07 2012-04-26 Sumitomo Bakelite Co Ltd Substrate treatment apparatus and method
JP2012082448A (en) * 2010-10-07 2012-04-26 Sumitomo Bakelite Co Ltd Substrate treatment apparatus and method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5662998A (en) * 1979-10-24 1981-05-29 C Uyemura & Co Ltd Surface processing method dependent upon high-speed vibration
JPS5818798A (en) * 1981-07-24 1983-02-03 株式会社日立製作所 Sensor checking apparatus
JPS6232690A (en) * 1985-08-05 1987-02-12 三菱電機株式会社 Plating of printed circuit board

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5662998A (en) * 1979-10-24 1981-05-29 C Uyemura & Co Ltd Surface processing method dependent upon high-speed vibration
JPS5818798A (en) * 1981-07-24 1983-02-03 株式会社日立製作所 Sensor checking apparatus
JPS6232690A (en) * 1985-08-05 1987-02-12 三菱電機株式会社 Plating of printed circuit board

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311061U (en) * 1989-06-19 1991-02-01
JPH04103195A (en) * 1990-08-22 1992-04-06 Toppan Printing Co Ltd Manufacturing device of small diameter through-hole printed wiring board
WO2011105072A1 (en) * 2010-02-24 2011-09-01 住友ベークライト株式会社 Substrate treating method and substrate treating apparatus
JP2012082447A (en) * 2010-10-07 2012-04-26 Sumitomo Bakelite Co Ltd Substrate treatment apparatus and method
JP2012082448A (en) * 2010-10-07 2012-04-26 Sumitomo Bakelite Co Ltd Substrate treatment apparatus and method

Also Published As

Publication number Publication date
JPH0362315B2 (en) 1991-09-25

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