JP2009076553A - Electroless plating method of printed circuit board - Google Patents

Electroless plating method of printed circuit board Download PDF

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Publication number
JP2009076553A
JP2009076553A JP2007242244A JP2007242244A JP2009076553A JP 2009076553 A JP2009076553 A JP 2009076553A JP 2007242244 A JP2007242244 A JP 2007242244A JP 2007242244 A JP2007242244 A JP 2007242244A JP 2009076553 A JP2009076553 A JP 2009076553A
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plating
hole
printed circuit
circuit board
printed wiring
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Tsutomu Zama
努 座間
Nobuyuki Yoshida
信之 吉田
Yoshikazu Gouma
吉和 合摩
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Lincstech Circuit Co Ltd
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Hitachi AIC Inc
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  • Electroplating Methods And Accessories (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem of insufficient supply of a plating liquid into a through-hole to lead to no formation of intended plating in that part due to difficulty of thorough removal of hydrogen bubbles generated in a through-hole and a non-penetrating through-hole in conventional plating by vibration or shaking in an electroless plating method of a printed circuit board having the non-penetrating through-hole. <P>SOLUTION: In the plating method of the printed circuit board, when electroless plating is performed on the printed circuit board immersed in the plating liquid while vibrating the printed circuit board, bubbling is also applied from below the printed circuit board by varying the flow rate. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、プリント配線板のめっき方法に関するものである。特に、プリント配線板に振動を与えながら無電解めっきする方法に関するものである。   The present invention relates to a printed wiring board plating method. In particular, the present invention relates to a method of electroless plating while applying vibration to a printed wiring board.

プリント配線板には、必要に応じて、貫通スルーホールや非貫通スル−ホ−ルが設けられていて、一般的には、まず無電解めっきそして次に電解めっきというようにめっき処理によってスルーホール穴に導体を形成させている。めっき処理の際にめっき液がスルーホール内にも十分に供給されて、プリント配線板の表面と裏面だけでなく、スルーホール内にもめっきが形成されるようにする必要がある。このとき、無電解めっき反応により水素ガスが発生し気泡となってスルーホール内に留まる場合があり、スルーホール内から取り除かないとめっき反応が停止してしまうことになる。   The printed wiring board is provided with through-holes and non-through-holes as needed. Generally, through-holes are formed by plating treatment such as electroless plating and then electrolytic plating. A conductor is formed in the hole. In the plating process, it is necessary that the plating solution is sufficiently supplied also into the through hole so that the plating is formed not only on the front and back surfaces of the printed wiring board but also in the through hole. At this time, hydrogen gas may be generated due to the electroless plating reaction and may remain in the through hole as a bubble. If it is not removed from the through hole, the plating reaction stops.

そのための対策として従来、プリント配線板が浸漬されているめっき槽において、プリント配線板をめっき中で振動させてスルーホール内から水素ガスを早く離脱させていた(特許文献1)。また振動に加え、被めっき物より発生する電解熱を効果的にうばって迅速に被めっき物冷却するとともに、被めっき物のスルーホール内より除去された空気やゴミも効果的に除去しうるためにエアレーション(空気によるバブリング)を併用(特許文献2)してめっきしていた。
特開昭62−154798号公報 特開平11−189880号公報
As a countermeasure for this, conventionally, in a plating tank in which a printed wiring board is immersed, the printed wiring board is vibrated during plating to quickly release hydrogen gas from the through hole (Patent Document 1). In addition to vibration, the electrolytic heat generated from the object to be plated is effectively cooled to quickly cool the object to be plated, and the air and dust removed from the through hole of the object to be plated can also be effectively removed. And aeration (bubble bubbling with air) (Patent Document 2).
JP 62-154798 A Japanese Patent Laid-Open No. 11-189880

しかしながら上記の方法でのめっきでは、振動させたり、単にエアレーションを併用させたりしても、貫通スルーホールや特に非貫通スル−ホ−ル中に発生した水素気泡を完全に取り除くことは困難で、そのためにスルーホール内にめっき液の供給が十分行われるとはいえず、その部分のスルーホール内に目的のめっきが形成されなかった。
本発明は、プリント配線板のスル−ホ−ル内の水素気泡を取り除いて、スルーホール、特により困難な非貫通スル−ホ−ル内にもめっき液の供給が十分行われるプリント配線板のめっき方法を提供することを目的としている。
However, in the plating by the above method, it is difficult to completely remove the hydrogen bubbles generated in the through through hole and particularly in the non-through through hole even if it is vibrated or simply combined with aeration. Therefore, it cannot be said that the plating solution is sufficiently supplied into the through hole, and the target plating is not formed in the through hole in that portion.
The present invention eliminates the hydrogen bubbles in the through hole of the printed wiring board, and the printed wiring board is sufficiently supplied with the plating solution in the through hole, particularly in the more difficult non-penetrating through hole. The object is to provide a plating method.

本発明は、非貫通スル−ホ−ルを有するプリント配線板の無電解めっき方法において、無電解めっき液に浸漬した前記プリント配線板に振動を与えながらめっきする際に、合わせて流量に強弱をもたせたバブリングを前記プリント配線板の下方から加えることを特徴とするプリント配線板の無電解めっき方法を提供することである。
また、バブリングの流量の強弱が2段階で、弱流量の時間が強流量の時間より短いことを特徴とする上記のプリント配線板の無電解めっき方法を提供することである。
In the electroless plating method for a printed wiring board having a non-through hole, the present invention is adapted to increase or decrease the flow rate when plating while applying vibration to the printed wiring board immersed in an electroless plating solution. An object of the present invention is to provide a method for electroless plating of a printed wiring board, wherein the exposed bubbling is added from below the printed wiring board.
Another object of the present invention is to provide an electroless plating method for a printed wiring board as described above, wherein the bubbling flow rate has two levels and the weak flow rate is shorter than the strong flow time.

本発明のめっき方法は、めっき液に浸漬したプリント配線板に振動を与えながら無電解めっきする際に、合わせて流量に強弱をもたせたバブリングを前記プリント配線板の下方から加えるので、行き止まりの穴である非貫通スル−ホ−ル内のめっき液圧に、圧縮と圧縮解放が交互に起こり、めっき液が流れ込もうとする流入作用と流出作用が交互に起こるので、その作用にそって、非貫通スル−ホ−ルに発生した水素気泡を、非貫通スル−ホ−ル外に効果的の押し出すことができ、非貫通スルーホール内にめっき液を十分供給することができる。また、バブリングの気体が空気または酸素の場合、液中の酸素濃度が定期的に変化し、それに合わせて水素濃度も定期的に変化する。水素濃度を定期的に変化させることにより、水素気泡にショックを与え、気泡の解放を促すことができる。それにより、非貫通スルーホール内にめっき液を十分供給することができる。
また、バブリングの流量の強弱が2段階で、バブリングの強流量の時間が弱流量の時間より長くすることで、行き止まりの穴である非貫通スル−ホ−ル内のめっき液圧を十分高かめることができるので、それが解放されたとき、非貫通スル−ホ−ルに発生した水素気泡を非貫通スル−ホ−ル外に効果的の押し出すことができる。
In the plating method of the present invention, when electroless plating is performed while vibration is applied to a printed wiring board immersed in a plating solution, bubbling with a strength of the flow rate is added from the lower side of the printed wiring board. As the plating solution pressure in the non-through-through hole is alternately compressed and released, the inflowing action and the outflowing action in which the plating solution tries to flow in alternately occur. Hydrogen bubbles generated in the non-penetrating through hole can be effectively pushed out of the non-penetrating through hole, and the plating solution can be sufficiently supplied into the non-penetrating through hole. Further, when the bubbling gas is air or oxygen, the oxygen concentration in the liquid periodically changes, and the hydrogen concentration also periodically changes accordingly. By periodically changing the hydrogen concentration, it is possible to shock the hydrogen bubbles and promote the release of the bubbles. Thereby, the plating solution can be sufficiently supplied into the non-through hole.
In addition, the bubbling flow rate has two levels, and the bubbling flow rate is set longer than the weak flow time, thereby sufficiently increasing the plating solution pressure in the non-through-hole, which is a dead end hole. Therefore, when it is released, hydrogen bubbles generated in the non-through hole can be effectively pushed out of the non-through hole.

本発明に述べる非貫通スル−ホ−ルは、めっき時に貫通していない全ての接続穴で、2以上の複数の導体層の層間を接続するためのめっきをした穴であるインタースティシャルバイアホール(IVH)が含まれる。また、穴内表面がめっきしたもののほか、穴内部をすべてめっきで充填するフィルドビアも含まれる。   The non-penetrating through hole described in the present invention is an interstitial via hole which is a plated hole for connecting the layers of two or more conductor layers, with all the connecting holes not penetrating at the time of plating. (IVH) is included. In addition to the plated inner surface, filled vias that fill the entire hole with plating are also included.

本発明に述べるバブリングは、空気、酸素または窒素などの気体をバブリング用の気体とし、めっき液中にノズルからこれらの気体を泡状に排出ものである。
気体としては、酸素含有ガス、特に、酸素を定量含み供給が容易な空気が好ましい。酸素ガスは、めっき液中の溶存酸素濃度に関係し、一般的にめっき液中の溶存酸素濃度が多いと、めっき液を安定に保つほか、無電解めっき液の安定性が向上することが知られている。めっき液中の溶存酸素濃度は、無電解めっき反応によって発生する水素ガスにより低下する傾向にあるので、十分な量を供給する必要がある。
気泡は、エアーノズルより調整され吐出される微細エアーが望ましい。また、気体の量はめっき液1mあたり0.05L/分 〜0.07L/分程度が望ましい。
ノズルの形状は、管状のものに多数の穴を開けたものや、多孔質樹脂チューブ、吹き出し側をセラミック多孔質体にした筒状のものなどが使用できる。管状のものに多数の穴を開けたものの各穴径は、0.1mmから2.0mm程度で、全て同じ穴径でも周期的に径を変えてもかまわない。
吹き出し面は、多孔質体の場合上面でもかまわないが、管状のものに穴を開けたもの場合、管の中心から下面に45度程度離れた2方向の位置に3mmから10mmピッチ程度で千鳥になるように並列に設けると、管の長さ方向に均一にガスが吹き出しやすい。
ノズル部分の配置は、特に細長い場合、被めっき体であるプリント配線板を、間隔を設けて複数立たせて、ガスを下方から吹き出させるため、プリント配線板の面方向とは直角方向の方が、個々のプリント配線にあたるガス量が均一化しやすいので好ましい。
エア−通気流量に強弱をもたせた方法は、めっき槽内でプリント配線板の下方から加えるエア−通気量に強弱の段差をもたせ、定時間間隔で繰り返す方法で、強流量は弱流量の1.1倍から3倍程度の差の量で、間隔は5から30秒間で繰り返すことで、非貫通スル−ホ−ル内のめっき液圧を可変して非貫通スル−ホ−ルに発生した水素気泡を非貫通スル−ホ−ル外に効果的の押し出す効果がある。
In the bubbling described in the present invention, a gas such as air, oxygen or nitrogen is used as a bubbling gas, and these gases are discharged from a nozzle into a plating solution in the form of bubbles.
The gas is preferably an oxygen-containing gas, particularly air that contains a fixed amount of oxygen and can be easily supplied. Oxygen gas is related to the dissolved oxygen concentration in the plating solution. Generally, if the dissolved oxygen concentration in the plating solution is high, the plating solution is kept stable and the stability of the electroless plating solution is improved. It has been. Since the dissolved oxygen concentration in the plating solution tends to decrease due to the hydrogen gas generated by the electroless plating reaction, it is necessary to supply a sufficient amount.
The air bubbles are preferably fine air that is adjusted and discharged from an air nozzle. The amount of gas is preferably about 0.05 L / min to 0.07 L / min per 1 m 3 of the plating solution.
As the shape of the nozzle, there can be used a tubular one having a large number of holes, a porous resin tube, a cylindrical one having a blower side made of a ceramic porous body, and the like. The diameter of each hole of a tubular body having a large number of holes is about 0.1 mm to 2.0 mm, and all of them may be the same diameter or the diameter may be changed periodically.
The blow-out surface may be the upper surface in the case of a porous body, but in the case where a hole is made in a tubular body, it is staggered at a pitch of 3 mm to 10 mm at a position in two directions about 45 degrees away from the center of the tube to the lower surface. If it is provided in parallel, the gas can be easily blown out uniformly in the length direction of the tube.
The arrangement of the nozzle part is particularly elongated, in order to allow a plurality of printed wiring boards to be plated to stand and to blow out gas from below, the direction perpendicular to the surface direction of the printed wiring board is This is preferable because the amount of gas corresponding to each printed wiring is easily uniformized.
The method of giving strength to the air-flow rate is a method in which the air-flow rate applied from the lower side of the printed wiring board in the plating tank is made to have a strong and weak step and is repeated at regular time intervals. Hydrogen generated in the non-penetrating through hole by varying the plating solution pressure in the non-penetrating through hole by repeating the interval of 5 to 30 seconds with an amount of difference of about 1 to 3 times. This has the effect of effectively extruding the bubbles out of the non-penetrating through hole.

本発明に述べる振動を与える方法は、プリント配線板を、プリント配線板を支持するめっき治具に縦に一枚以上複数並べて装着し、このめっき治具に固定して、このめっき治具をめっき槽に設置した振動脱泡装置へ装着する。
振動めっき装置は、振動装置によりめっき治具を介してプリント配線板に1から3Gの振動加速度を加えプリント配線板を振動させる。
According to the method of applying vibration described in the present invention, one or more printed wiring boards are vertically arranged and mounted on a plating jig that supports the printed wiring board, and the plating jig is fixed to the plating jig. Attach to the vibration deaerator installed in the tank.
The vibration plating apparatus applies vibration acceleration of 1 to 3G to the printed wiring board through the plating jig by the vibration apparatus to vibrate the printed wiring board.

本発明に述べる無電解めっき液は、被めっき物に還元剤によりめっきさせる一般的な液で、特に、金属イオンが還元されて金属が析出するとともに、反応により水素や窒素などのガスが発生するものが含まれる。たとえば、銅イオンの還元剤にホルムアルデヒドを使用した場合は水素ガス、ニッケルイオンの還元剤にヒドラジンを使用した場合は窒素ガスが発生する。   The electroless plating solution described in the present invention is a general solution for plating an object to be plated with a reducing agent. In particular, a metal ion is reduced to deposit a metal, and a gas such as hydrogen or nitrogen is generated by the reaction. Things are included. For example, hydrogen gas is generated when formaldehyde is used as a reducing agent for copper ions, and nitrogen gas is generated when hydrazine is used as a reducing agent for nickel ions.

本発明の振動めっき装置により、非貫通スル−ホ−ル内でめっき反応により生成したガス(水素等)がランダムにポンピング作用して非貫通スル−ホ−ル外へ脱泡される。
また非貫通スル−ホ−ル内外の無電解銅めっき液圧が変化してガス気泡の非貫通スル−ホ−ル外へ脱泡と非貫通スル−ホ−ル内への無電解銅めっき液の供給が行われ、非貫通スル−ホ−ル内の無電解めっき反応が効果的に行われる。
With the vibration plating apparatus of the present invention, gas (hydrogen or the like) generated by the plating reaction in the non-penetrating through hole is randomly pumped and degassed outside the non-penetrating through hole.
In addition, the electroless copper plating solution pressure inside and outside the non-penetrating through hole is changed so that the gas bubbles are defoamed outside the non-penetrating through hole and the electroless copper plating solution into the non-penetrating through hole. Thus, the electroless plating reaction in the non-penetrating through hole is effectively performed.

以下、本発明を図面に示す実施の形態に基づいて説明する。
図1は、プリント基板を振動めっき装置に設置して、強弱をもたせたバブリングでめっきする本発明の実施状態を模式的に示している。
振動めっき装置は、振動台1の両端に設けた振動モーター2により振動が誘起され、振動台1に設けたV字受け3と接触するV字部4を有するつり下げ治具5と、非貫通スルーホールを有するプリント基板6を縦に間隔をあけてセットしたかご状のめっきラック治具7とを固定治具8で固定する。また、振動台1は、防振スプリング9を介して、振動装置の底部から伸びるスプリング台受け用の支柱10に乗っている。また、かご状のめっきラック治具7は、スプリング台受け用の支柱10の間に設けた無電解銅めっき槽11の中に沈める。また、エアーの通気配管12は、無電解銅めっき槽の上面端部から挿入し、底面に設けたノズル13よりバブリングを行う。
図2は、本発明の実施状態の振動めっき装置の例で、図2(a)は、正面断面図、2(b)は、側面断面図を示している。
非貫通スルーホールを有するプリント基板6を面支持するめっきマガジン治具19は、縦40cm、横53cm、高さ50cmからなり、一枚以上複数(最大24枚)並べて装着したものを4個まで、かご状のめっきラック治具7(縦60cm、横86cm、高さ108cm、ステンレス製の四角形)の上下二列に収納している。
かご状のめっきラック治具7は、つり下げ治具5と、各つり下げ治具2カ所計4カ所のV字部とV字受けによりつり下げられている。
エアーの通気配管12のノズルは、直径が1.0cmの筒状で、かご状のめっきラック治具7の底面より10cm下方にあり、ノズルの穴は、径が0.8mmで、5cm間隔で、下面からそれぞれ30から90度(好ましくは45度)離れた2方向の位置に設けている。
Hereinafter, the present invention will be described based on embodiments shown in the drawings.
FIG. 1 schematically shows an implementation state of the present invention in which a printed circuit board is installed in a vibration plating apparatus and plated by bubbling with strength.
The vibration plating apparatus includes a suspension jig 5 having a V-shaped portion 4 that is in contact with a V-shaped receiver 3 provided on the vibration table 1, and vibration is induced by vibration motors 2 provided at both ends of the vibration table 1. A cage-like plating rack jig 7 in which printed circuit boards 6 having through holes are vertically spaced is fixed by a fixing jig 8. The vibration table 1 is mounted on a support 10 for a spring table that extends from the bottom of the vibration device via a vibration-proof spring 9. Further, the cage-shaped plating rack jig 7 is submerged in an electroless copper plating tank 11 provided between the columns 10 for supporting the spring base. The air vent pipe 12 is inserted from the upper surface end of the electroless copper plating tank, and is bubbled from the nozzle 13 provided on the bottom surface.
FIG. 2 is an example of a vibration plating apparatus according to an embodiment of the present invention. FIG. 2 (a) is a front sectional view and 2 (b) is a side sectional view.
The plating magazine jig 19 that supports the printed circuit board 6 having a non-through hole has a length of 40 cm, a width of 53 cm, and a height of 50 cm. The basket-like plating rack jig 7 (60 cm in length, 86 cm in width, 108 cm in height, stainless steel square) is housed in two upper and lower rows.
The cage-shaped plating rack jig 7 is suspended by a suspension jig 5 and two V-shaped portions and V-shaped receptacles in total of two suspension jigs.
The nozzle of the air ventilation pipe 12 has a cylindrical shape with a diameter of 1.0 cm, and is 10 cm below the bottom surface of the cage-like plating rack jig 7. The nozzle holes have a diameter of 0.8 mm and are spaced at intervals of 5 cm. , Provided in two positions at 30 to 90 degrees (preferably 45 degrees) from the lower surface.

以下、本発明を実施例に基づいて説明する。なお、非貫通スルーホール部の銅めっき付周り性の評価は、図3の、非貫通スルホール部の銅めっき後の断面図で示した数値に従い、下記の数式1により求めた。   Hereinafter, the present invention will be described based on examples. In addition, evaluation of the copper plating attachment property of a non-through-through-hole part was calculated | required by following Numerical formula 1 according to the numerical value shown in sectional drawing after copper plating of the non-through-through hole part of FIG.

Figure 2009076553
c:非貫通スルホール左側面のめっき厚
d:非貫通スルホール右側面のめっき厚
e:非貫通スルホール底面のめっき厚
a:非貫通スルホール入り口左側表面のめっき厚
b:非貫通スルホール入り口右側表面のめっき厚
Figure 2009076553
c: plating thickness of left side surface of non-through-through hole d: plating thickness of right side surface of non-through-through hole e: plating thickness of bottom surface of non-through-through hole a: plating thickness of left-side surface of non-through-through hole b: plating of right side surface of non-through-through hole Thickness

(実施例1)
プリント基板のコア基板材料として、MCL−E67WK(日立化成工業株式会社製 製品名)ガラスエポキシ樹脂銅張り積層板(厚み0.8mm)及び絶縁層材料として日立化成工業株式会社製プリプレグ製品名GEA−67(厚み0.06mm)を用い、ガラスエポキシ樹脂銅張り積層板を所定の両側に内層回路を形成後、プリプレグを介して、厚み12μmの銅箔を重ね、積層プレス機により加圧、加熱して4層銅張り積層板を製作した。
この最外層には、片側閉塞タイプの非貫通スルーホール、(ビアトップ直径0.08mm、0.09mm、0.10mm、0.125mm、絶縁層厚み0.06mm)をレーザ加工により設けた。
次いで片側閉塞タイプの非貫通スルーホールの形成時に、スルーホール内壁に溶着した樹脂(スミア)を除去するデスミア処理と、スルーホール内壁を導電化するめっき触媒化処理を行った。
次いで、本発明による前述の4層銅張り積層板に2Gの振動を与えながら、合わせて流量に強弱〔強流量:0.07L/L・分で17秒間、弱流量:0.05L/L・分で10秒間の繰返し〕をもたせた空気によるバブリングを4層銅張り積層板の下方から加える無電解銅めっき方法を適用して、非貫通スルーホール及び基板表面に、厚さ12μmの無電解銅めっき膜を形成した。
次いで、銅めっき膜を形成した4層銅張り積層板の両面に写真法により焼付け、現像、エッチングを行い、非貫通スルーホールの連結した接続回路を形成し、接続パターンを形成したプリント基板の非貫通スルーホール部の銅めっき付周り性を非貫通スルーホール内壁部の断面観察を行い、銅めっき膜厚測定により判定した。
Example 1
MCL-E67WK (product name manufactured by Hitachi Chemical Co., Ltd.) glass epoxy resin copper-clad laminate (thickness 0.8 mm) as the core substrate material of the printed circuit board, and prepreg product name GEA- manufactured by Hitachi Chemical Co., Ltd. as the insulating layer material 67 (thickness 0.06mm), glass epoxy resin copper-clad laminate was formed on both sides of the inner layer circuit, copper foil with a thickness of 12μm was layered through a prepreg, and pressed and heated by a laminating press. A four-layer copper-clad laminate was produced.
This outermost layer was provided with a one-side closed type non-through hole (via top diameter 0.08 mm, 0.09 mm, 0.10 mm, 0.125 mm, insulating layer thickness 0.06 mm) by laser processing.
Next, when forming the one-side closed type non-through hole, a desmear process for removing the resin (smear) deposited on the inner wall of the through hole and a plating catalyst process for making the inner wall of the through hole conductive were performed.
Next, while giving a vibration of 2 G to the above-described four-layer copper-clad laminate according to the present invention, the flow rate is increased and decreased [strong flow rate: 0.07 L / L · min for 17 seconds, weak flow rate: 0.05 L / L · Applying an electroless copper plating method in which bubbling with air with a repetition of 10 seconds in minutes is applied from below the four-layer copper-clad laminate, electroless copper with a thickness of 12 μm is applied to the non-through-through holes and the substrate surface. A plating film was formed.
Next, the four-layer copper-clad laminate on which the copper plating film is formed is baked, developed, and etched by photographic method to form a connection circuit in which non-through-holes are connected. Cross-sectional observation of the inner wall portion of the non-through-through hole was performed by determining the ability of the through-through hole to be plated with copper by measuring the thickness of the copper plating.

(比較例1)
通気流量を一定(0.07L/L・分)にしたエアーバブリング以外実施例1と同様に、無電解銅めっき法で非貫通スルーホール及び基板表面に12μmの銅めっき膜を形成した。
次いで実施例1と同様に、銅めっき膜を形成したプリント基板の両面に非貫通スルーホールの連結した接続パターンを形成し、断面観察による非貫通スルーホール内壁部の断面観察を行い、銅めっき膜厚測定により非貫通スルーホール部の銅めっき付周り性を判定した。
(Comparative Example 1)
Except for air bubbling with a constant air flow rate (0.07 L / L · min), a 12 μm-thick copper plating film was formed on the non-through hole and the substrate surface by the electroless copper plating method in the same manner as in Example 1.
Next, similarly to Example 1, a connection pattern in which non-through holes are connected is formed on both surfaces of a printed circuit board on which a copper plating film is formed, and a cross-sectional observation of the inner wall of the non-through hole is performed by cross-sectional observation. Thickness measurement was performed to determine the ability of the non-penetrating through hole portion to be plated with copper.

(比較例2)
エアーバブリングを適用しない以外実施例1と同様に、無電解銅めっき法で非貫通スルーホール及び基板表面に12μmの銅めっき膜を形成した。
次いで実施例1と同様に、銅めっき膜を形成したプリント基板の両面に非貫通スルーホールの連結した接続パターンを形成し、断面観察による非貫通スルーホール内壁部の断面観察を行い、銅めっき膜厚測定により非貫通スルーホール部の銅めっき付周り性を判定した。
(Comparative Example 2)
In the same manner as in Example 1 except that air bubbling was not applied, a 12 μm copper plating film was formed on the surface of the non-through hole and the substrate by electroless copper plating.
Next, similarly to Example 1, a connection pattern in which non-through holes are connected is formed on both surfaces of a printed circuit board on which a copper plating film is formed, and a cross-sectional observation of the inner wall of the non-through hole is performed by cross-sectional observation. Thickness measurement was performed to determine the ability of the non-penetrating through hole portion to be plated with copper.

実施例1、比較例1及び比較例2の非貫通スルーホールの銅めっき付き周り性評価結果を表1に示す。



Table 1 shows the results of evaluating the peripherality with copper plating of the non-through holes of Example 1, Comparative Example 1 and Comparative Example 2.



Figure 2009076553
表1より、実施例及び比較例1、比較例2から、本発明の振動めっき装置及び流量に強弱をもたせたエアーバブリングを適用した無電解銅めっき方法により、非貫通スルーホールへの良好な銅めっき付き周り性を得ることができることがわかる。
Figure 2009076553
From Table 1 and Example 1, Comparative Example 1 and Comparative Example 2, good copper to non-through holes is obtained by the electroless copper plating method using the vibration plating apparatus of the present invention and the air bubbling with the strength of the flow rate. It turns out that the surrounding property with plating can be obtained.

(実施例2、3、4及び5)
エア−バブリングの強流量時間と弱流量時間を表2のようにした以外実施例1と同様に、厚付け無電解銅めっき法で非貫通スルーホール及び基板表面に12μmの銅めっき膜を形成した。
次いで実施例1と同様に、銅めっき膜を形成したプリント基板の両面に非貫通スルーホールの連結した接続パターンを形成し、ビアトップ直径0.10mmの非貫通スルーホール内壁部の断面観察を行い、銅めっき膜厚測定により非貫通スルーホール部の銅めっき付周り性を判定した。
(Examples 2, 3, 4 and 5)
A non-through-through hole and a 12 μm copper plating film were formed on the substrate surface by a thick electroless copper plating method in the same manner as in Example 1 except that the strong flow time and the weak flow time of air bubbling were as shown in Table 2. .
Next, as in Example 1, a connection pattern in which non-through holes are connected is formed on both surfaces of a printed circuit board on which a copper plating film is formed, and a cross-sectional observation of the inner wall of the non-through hole with a via top diameter of 0.10 mm is performed. Then, the copper plating attachment property of the non-through-hole portion was determined by measuring the copper plating film thickness.

実施例2、3、4、5及び実施例1の、ビアトップ直径が0.10mmの非貫通スルーホールの銅めっき付き周り性評価結果を表2に示す。   Table 2 shows the results of evaluation of the peripheral property with copper plating of the non-through-holes having a via top diameter of 0.10 mm in Examples 2, 3, 4, 5 and Example 1.

Figure 2009076553
表2より、強流量時間が、弱流量時間より長いほうが、同じか、短いより、貫通スルーホールへの良好な銅めっき付き周り性を得ることができることがわかる。
Figure 2009076553
From Table 2, it can be seen that a better flowability with copper plating to the through-through hole can be obtained when the strong flow time is longer than the weak flow time than the same or shorter.

本発明に係る振動めっき装置とバブリングによるプリント配線板の無電解めっき方法を模式的に示している。1 schematically shows an electroless plating method for a printed wiring board by a vibration plating apparatus and bubbling according to the present invention. 本発明の実施状態の振動めっき装置の例を示している。The example of the vibration plating apparatus of the implementation state of this invention is shown. 非貫通スルホール部のめっき後の断面図を模式的に示している。Sectional drawing after the plating of a non-penetrating through-hole part is shown typically.

符号の説明Explanation of symbols

1…振動台、2…振動モータ−、3…V字受け、4…V字部、5…つり下げ治具、6…プリント基板、7…めっきラック治具、8…固定治具、9…防振スプリング、10…スプリング台受け用の支柱、11…無電解銅めっき槽、12…エアー配管、13…ノズル、14…非貫通スルーホール、15…無電解銅めっき、16…プリプレグ、17…銅箔、18…コア基板、19…めっきマガジン治具。   DESCRIPTION OF SYMBOLS 1 ... Shaking table, 2 ... Vibration motor, 3 ... V-shaped receptacle, 4 ... V-shaped part, 5 ... Suspension jig, 6 ... Printed circuit board, 7 ... Plating rack jig, 8 ... Fixing jig, 9 ... Anti-vibration springs, 10 ... posts for receiving springs, 11 ... electroless copper plating tank, 12 ... air piping, 13 ... nozzles, 14 ... non-through holes, 15 ... electroless copper plating, 16 ... prepreg, 17 ... Copper foil, 18 ... core substrate, 19 ... plating magazine jig.

Claims (2)

非貫通スル−ホ−ルを有するプリント配線板の無電解めっき方法において、無電解めっき液に浸漬した前記プリント配線板に振動を与えながらめっきする際に、合わせて流量に強弱をもたせたバブリングを前記プリント配線板の下方から加えることを特徴とするプリント配線板の無電解めっき方法。   In the electroless plating method of a printed wiring board having a non-through hole, bubbling that gives strength to the flow rate is also applied when plating while vibrating the printed wiring board immersed in an electroless plating solution. An electroless plating method for a printed wiring board, wherein the method is applied from below the printed wiring board. バブリングの流量の強弱が2段階で、弱流量の時間が強流量の時間より短いことを特徴とする請求項1のプリント配線板の無電解めっき方法。   2. The method of electroless plating of a printed wiring board according to claim 1, wherein the bubbling flow rate is in two stages and the weak flow time is shorter than the strong flow time.
JP2007242244A 2007-09-19 2007-09-19 Electroless plating method of printed circuit board Pending JP2009076553A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102191520A (en) * 2011-05-05 2011-09-21 牡丹江市万通微孔技术开发有限责任公司 Pinhole eliminator for hard chrome plating
JP2011214131A (en) * 2010-04-01 2011-10-27 Samsung Electro-Mechanics Co Ltd Apparatus and method for measuring activity of plating liquid
CN104178786A (en) * 2013-05-21 2014-12-03 北大方正集团有限公司 Electroplating method for making printed circuit board (PCB)
CN115426792A (en) * 2022-11-03 2022-12-02 四川宏安兴盛电子科技有限公司 Circuit board conveying device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011214131A (en) * 2010-04-01 2011-10-27 Samsung Electro-Mechanics Co Ltd Apparatus and method for measuring activity of plating liquid
CN102191520A (en) * 2011-05-05 2011-09-21 牡丹江市万通微孔技术开发有限责任公司 Pinhole eliminator for hard chrome plating
CN104178786A (en) * 2013-05-21 2014-12-03 北大方正集团有限公司 Electroplating method for making printed circuit board (PCB)
CN115426792A (en) * 2022-11-03 2022-12-02 四川宏安兴盛电子科技有限公司 Circuit board conveying device
CN115426792B (en) * 2022-11-03 2023-02-21 四川宏安兴盛电子科技有限公司 Circuit board conveying device

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