JPS62152432U - - Google Patents

Info

Publication number
JPS62152432U
JPS62152432U JP3972386U JP3972386U JPS62152432U JP S62152432 U JPS62152432 U JP S62152432U JP 3972386 U JP3972386 U JP 3972386U JP 3972386 U JP3972386 U JP 3972386U JP S62152432 U JPS62152432 U JP S62152432U
Authority
JP
Japan
Prior art keywords
reaction tube
lid body
heat
semiconductor wafers
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3972386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3972386U priority Critical patent/JPS62152432U/ja
Publication of JPS62152432U publication Critical patent/JPS62152432U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Resistance Heating (AREA)
JP3972386U 1986-03-20 1986-03-20 Pending JPS62152432U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3972386U JPS62152432U (enrdf_load_stackoverflow) 1986-03-20 1986-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3972386U JPS62152432U (enrdf_load_stackoverflow) 1986-03-20 1986-03-20

Publications (1)

Publication Number Publication Date
JPS62152432U true JPS62152432U (enrdf_load_stackoverflow) 1987-09-28

Family

ID=30853157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3972386U Pending JPS62152432U (enrdf_load_stackoverflow) 1986-03-20 1986-03-20

Country Status (1)

Country Link
JP (1) JPS62152432U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002158217A (ja) * 2000-11-16 2002-05-31 Tokyo Electron Ltd 縦型熱処理装置及び熱処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002158217A (ja) * 2000-11-16 2002-05-31 Tokyo Electron Ltd 縦型熱処理装置及び熱処理方法

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