JPS62151618U - - Google Patents

Info

Publication number
JPS62151618U
JPS62151618U JP3851486U JP3851486U JPS62151618U JP S62151618 U JPS62151618 U JP S62151618U JP 3851486 U JP3851486 U JP 3851486U JP 3851486 U JP3851486 U JP 3851486U JP S62151618 U JPS62151618 U JP S62151618U
Authority
JP
Japan
Prior art keywords
flow path
pressure
valve body
piezoelectric actuator
adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3851486U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3851486U priority Critical patent/JPS62151618U/ja
Publication of JPS62151618U publication Critical patent/JPS62151618U/ja
Pending legal-status Critical Current

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  • Control Of Fluid Pressure (AREA)

Description

【図面の簡単な説明】
第1図は本考案の一実施例を示す構成図、第2
図は他の実施例を示す構成図、第3図は従来例を
示す断面図である。 1……基体、2……導入口、3……導出口、4
……流路、6……弁体、7……積層圧電アクチユ
エータ、14……圧力センサ、F……流体。

Claims (1)

    【実用新案登録請求の範囲】
  1. 基体に形成された流体の導入口及び導出口との
    間の流路を弁体によつて開度調整することにより
    流体圧力を調整するようにした圧力調整器におい
    て、前記基体に前記弁体を駆動するための積層圧
    電アクチユエータと、前記流路内の流体圧力を検
    出するための圧力センサとを設け、該圧力センサ
    の検出出力に基づいて前記積層圧電アクチユエー
    タを制御し、もつて前記弁体による流路の開度調
    整を行うようにしたことを特徴とする圧力調整器
JP3851486U 1986-03-15 1986-03-15 Pending JPS62151618U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3851486U JPS62151618U (ja) 1986-03-15 1986-03-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3851486U JPS62151618U (ja) 1986-03-15 1986-03-15

Publications (1)

Publication Number Publication Date
JPS62151618U true JPS62151618U (ja) 1987-09-25

Family

ID=30850834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3851486U Pending JPS62151618U (ja) 1986-03-15 1986-03-15

Country Status (1)

Country Link
JP (1) JPS62151618U (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5729871A (en) * 1980-07-26 1982-02-17 Daikin Ind Ltd Valve using bimorph piezoelectric element
JPS60129482A (ja) * 1983-12-13 1985-07-10 Nippon Denso Co Ltd 圧電素子駆動の制御弁

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5729871A (en) * 1980-07-26 1982-02-17 Daikin Ind Ltd Valve using bimorph piezoelectric element
JPS60129482A (ja) * 1983-12-13 1985-07-10 Nippon Denso Co Ltd 圧電素子駆動の制御弁

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