JPS62149868A - 強磁性体の高速スパツタリング方法 - Google Patents
強磁性体の高速スパツタリング方法Info
- Publication number
- JPS62149868A JPS62149868A JP28997085A JP28997085A JPS62149868A JP S62149868 A JPS62149868 A JP S62149868A JP 28997085 A JP28997085 A JP 28997085A JP 28997085 A JP28997085 A JP 28997085A JP S62149868 A JPS62149868 A JP S62149868A
- Authority
- JP
- Japan
- Prior art keywords
- targets
- poles
- ferromagnetic material
- target
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003302 ferromagnetic material Substances 0.000 title claims abstract description 18
- 238000004544 sputter deposition Methods 0.000 title claims abstract description 13
- 230000005291 magnetic effect Effects 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 abstract description 3
- 239000002245 particle Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28997085A JPS62149868A (ja) | 1985-12-23 | 1985-12-23 | 強磁性体の高速スパツタリング方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28997085A JPS62149868A (ja) | 1985-12-23 | 1985-12-23 | 強磁性体の高速スパツタリング方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62149868A true JPS62149868A (ja) | 1987-07-03 |
| JPH0448871B2 JPH0448871B2 (enrdf_load_stackoverflow) | 1992-08-07 |
Family
ID=17750081
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28997085A Granted JPS62149868A (ja) | 1985-12-23 | 1985-12-23 | 強磁性体の高速スパツタリング方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62149868A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01104771A (ja) * | 1987-10-14 | 1989-04-21 | Anelva Corp | 平板マグネトロンスパッタ装置 |
| JPH03247761A (ja) * | 1990-02-23 | 1991-11-05 | Yoshihisa Nakamura | スパッタターゲット装置 |
| JPH0913169A (ja) * | 1995-06-29 | 1997-01-14 | Matsushita Electric Ind Co Ltd | スパッタリング装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58130277A (ja) * | 1982-01-27 | 1983-08-03 | Clarion Co Ltd | マグネトロンスパツタ装置 |
-
1985
- 1985-12-23 JP JP28997085A patent/JPS62149868A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58130277A (ja) * | 1982-01-27 | 1983-08-03 | Clarion Co Ltd | マグネトロンスパツタ装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01104771A (ja) * | 1987-10-14 | 1989-04-21 | Anelva Corp | 平板マグネトロンスパッタ装置 |
| JPH03247761A (ja) * | 1990-02-23 | 1991-11-05 | Yoshihisa Nakamura | スパッタターゲット装置 |
| JPH0913169A (ja) * | 1995-06-29 | 1997-01-14 | Matsushita Electric Ind Co Ltd | スパッタリング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0448871B2 (enrdf_load_stackoverflow) | 1992-08-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |