JPS62147332U - - Google Patents

Info

Publication number
JPS62147332U
JPS62147332U JP3525587U JP3525587U JPS62147332U JP S62147332 U JPS62147332 U JP S62147332U JP 3525587 U JP3525587 U JP 3525587U JP 3525587 U JP3525587 U JP 3525587U JP S62147332 U JPS62147332 U JP S62147332U
Authority
JP
Japan
Prior art keywords
wafer holder
wafer
container
loading
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3525587U
Other languages
English (en)
Japanese (ja)
Other versions
JPS633155Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987035255U priority Critical patent/JPS633155Y2/ja
Publication of JPS62147332U publication Critical patent/JPS62147332U/ja
Application granted granted Critical
Publication of JPS633155Y2 publication Critical patent/JPS633155Y2/ja
Expired legal-status Critical Current

Links

JP1987035255U 1987-03-12 1987-03-12 Expired JPS633155Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987035255U JPS633155Y2 (OSRAM) 1987-03-12 1987-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987035255U JPS633155Y2 (OSRAM) 1987-03-12 1987-03-12

Publications (2)

Publication Number Publication Date
JPS62147332U true JPS62147332U (OSRAM) 1987-09-17
JPS633155Y2 JPS633155Y2 (OSRAM) 1988-01-26

Family

ID=30844578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987035255U Expired JPS633155Y2 (OSRAM) 1987-03-12 1987-03-12

Country Status (1)

Country Link
JP (1) JPS633155Y2 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0247029U (OSRAM) * 1988-09-28 1990-03-30
JPH0350324U (OSRAM) * 1989-09-21 1991-05-16

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5351187A (en) * 1976-10-20 1978-05-10 Matsushita Electric Ind Co Ltd Gas phase chemical evaporation apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5351187A (en) * 1976-10-20 1978-05-10 Matsushita Electric Ind Co Ltd Gas phase chemical evaporation apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0247029U (OSRAM) * 1988-09-28 1990-03-30
JPH0350324U (OSRAM) * 1989-09-21 1991-05-16

Also Published As

Publication number Publication date
JPS633155Y2 (OSRAM) 1988-01-26

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