JPH01135734U - - Google Patents
Info
- Publication number
- JPH01135734U JPH01135734U JP3075688U JP3075688U JPH01135734U JP H01135734 U JPH01135734 U JP H01135734U JP 3075688 U JP3075688 U JP 3075688U JP 3075688 U JP3075688 U JP 3075688U JP H01135734 U JPH01135734 U JP H01135734U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- process tube
- purge
- mounting table
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 5
- 238000010926 purge Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3075688U JPH01135734U (OSRAM) | 1988-03-08 | 1988-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3075688U JPH01135734U (OSRAM) | 1988-03-08 | 1988-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01135734U true JPH01135734U (OSRAM) | 1989-09-18 |
Family
ID=31256101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3075688U Pending JPH01135734U (OSRAM) | 1988-03-08 | 1988-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01135734U (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0437025A (ja) * | 1990-05-31 | 1992-02-07 | Kyushu Electron Metal Co Ltd | 気相成長装置 |
| JP2010239142A (ja) * | 2010-05-31 | 2010-10-21 | Tokyo Electron Ltd | 熱処理装置及び熱処理方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6012728A (ja) * | 1983-07-01 | 1985-01-23 | Hitachi Ltd | 膜形成用電極構造体 |
| JPS62171115A (ja) * | 1986-01-23 | 1987-07-28 | Sumitomo Electric Ind Ltd | 気相成長装置の反応管 |
-
1988
- 1988-03-08 JP JP3075688U patent/JPH01135734U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6012728A (ja) * | 1983-07-01 | 1985-01-23 | Hitachi Ltd | 膜形成用電極構造体 |
| JPS62171115A (ja) * | 1986-01-23 | 1987-07-28 | Sumitomo Electric Ind Ltd | 気相成長装置の反応管 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0437025A (ja) * | 1990-05-31 | 1992-02-07 | Kyushu Electron Metal Co Ltd | 気相成長装置 |
| JP2010239142A (ja) * | 2010-05-31 | 2010-10-21 | Tokyo Electron Ltd | 熱処理装置及び熱処理方法 |