JPS6214728U - - Google Patents
Info
- Publication number
- JPS6214728U JPS6214728U JP10532585U JP10532585U JPS6214728U JP S6214728 U JPS6214728 U JP S6214728U JP 10532585 U JP10532585 U JP 10532585U JP 10532585 U JP10532585 U JP 10532585U JP S6214728 U JPS6214728 U JP S6214728U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- substrate structure
- tester
- wafer prober
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 10
- 230000000007 visual effect Effects 0.000 claims description 2
- 230000003028 elevating effect Effects 0.000 claims 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10532585U JPS6214728U (OSRAM) | 1985-07-10 | 1985-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10532585U JPS6214728U (OSRAM) | 1985-07-10 | 1985-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6214728U true JPS6214728U (OSRAM) | 1987-01-29 |
Family
ID=30979648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10532585U Pending JPS6214728U (OSRAM) | 1985-07-10 | 1985-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6214728U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63190350A (ja) * | 1987-02-02 | 1988-08-05 | Tokyo Electron Ltd | プロ−ブ装置 |
-
1985
- 1985-07-10 JP JP10532585U patent/JPS6214728U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63190350A (ja) * | 1987-02-02 | 1988-08-05 | Tokyo Electron Ltd | プロ−ブ装置 |
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