JPS62147249A - クリ−ンル−ム - Google Patents
クリ−ンル−ムInfo
- Publication number
- JPS62147249A JPS62147249A JP60286571A JP28657185A JPS62147249A JP S62147249 A JPS62147249 A JP S62147249A JP 60286571 A JP60286571 A JP 60286571A JP 28657185 A JP28657185 A JP 28657185A JP S62147249 A JPS62147249 A JP S62147249A
- Authority
- JP
- Japan
- Prior art keywords
- area
- equipment
- air
- clean
- air supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60286571A JPS62147249A (ja) | 1985-12-19 | 1985-12-19 | クリ−ンル−ム |
EP86906948A EP0250596B1 (en) | 1985-11-26 | 1986-11-26 | Clean room |
DE8686906948T DE3683492D1 (de) | 1985-11-26 | 1986-11-26 | Reinraum. |
US07/057,525 US4838150A (en) | 1985-11-26 | 1986-11-26 | Clean room |
PCT/JP1986/000603 WO1987003356A1 (en) | 1985-11-26 | 1986-11-26 | Clean room |
CA000525873A CA1280929C (en) | 1985-12-19 | 1986-12-19 | Clean room |
KR870700365A KR880700218A (ko) | 1985-11-26 | 1987-04-27 | 크린 룸 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60286571A JPS62147249A (ja) | 1985-12-19 | 1985-12-19 | クリ−ンル−ム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62147249A true JPS62147249A (ja) | 1987-07-01 |
JPH0535326B2 JPH0535326B2 (no) | 1993-05-26 |
Family
ID=17706131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60286571A Granted JPS62147249A (ja) | 1985-11-26 | 1985-12-19 | クリ−ンル−ム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62147249A (no) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201330U (no) * | 1986-06-11 | 1987-12-22 | ||
US5549512A (en) * | 1994-11-30 | 1996-08-27 | Lucent Technologies Inc. | Minienvironment for hazardous process tools |
JPH0989329A (ja) * | 1995-09-26 | 1997-04-04 | Benitsukusu Kk | クリーンルームの間仕切構造 |
JPH0989328A (ja) * | 1995-09-26 | 1997-04-04 | Benitsukusu Kk | クリーンルームの間仕切構造 |
US6264550B1 (en) * | 1997-07-11 | 2001-07-24 | Nippon Steel Semiconductor Corporation | Clean room and method of remodeling clean room |
US6347990B1 (en) * | 1999-04-03 | 2002-02-19 | Samsung Electronics Co., Ltd. | Microelectronic fabrication system cleaning methods and systems that maintain higher air pressure in a process area than in a transfer area |
-
1985
- 1985-12-19 JP JP60286571A patent/JPS62147249A/ja active Granted
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62201330U (no) * | 1986-06-11 | 1987-12-22 | ||
US5549512A (en) * | 1994-11-30 | 1996-08-27 | Lucent Technologies Inc. | Minienvironment for hazardous process tools |
JPH0989329A (ja) * | 1995-09-26 | 1997-04-04 | Benitsukusu Kk | クリーンルームの間仕切構造 |
JPH0989328A (ja) * | 1995-09-26 | 1997-04-04 | Benitsukusu Kk | クリーンルームの間仕切構造 |
US6264550B1 (en) * | 1997-07-11 | 2001-07-24 | Nippon Steel Semiconductor Corporation | Clean room and method of remodeling clean room |
US6347990B1 (en) * | 1999-04-03 | 2002-02-19 | Samsung Electronics Co., Ltd. | Microelectronic fabrication system cleaning methods and systems that maintain higher air pressure in a process area than in a transfer area |
Also Published As
Publication number | Publication date |
---|---|
JPH0535326B2 (no) | 1993-05-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0250596B1 (en) | Clean room | |
JP2021183841A (ja) | 送風装置、気流提供方法及び気流提供プログラム | |
KR101951569B1 (ko) | 무덕트형 공기청정 환기장치 | |
JP6767616B2 (ja) | 送風装置 | |
JPS62147249A (ja) | クリ−ンル−ム | |
JP7065264B2 (ja) | 熱交換形換気装置 | |
JP2551923Y2 (ja) | クリーンルーム | |
JPH09287791A (ja) | チャンバー付きファンフィルターユニット及びクリーンルーム | |
JPS62182541A (ja) | クリ−ンル−ム | |
JPS62147250A (ja) | クリ−ンル−ム | |
JP2536188B2 (ja) | 空気清浄装置 | |
JPH0668408B2 (ja) | クリ−ンル−ム用空気吹出装置およびこれを利用した高天井クリ−ンル−ム | |
JPH0611064Y2 (ja) | クリーンルーム用ファンフィルタユニット | |
JP2001153414A (ja) | 循環型クリーンルーム | |
JP2673799B2 (ja) | 空気清浄機とパーティションを用いた空調ルーム | |
JPH068695B2 (ja) | クリ−ンル−ム | |
JPH019669Y2 (no) | ||
JP3420722B2 (ja) | 局所空気清浄装置 | |
JP6851456B1 (ja) | クリーンルーム | |
JPH0724817B2 (ja) | エア−シヤワ−装置 | |
JPH0340334Y2 (no) | ||
JPH0515933B2 (no) | ||
JP3820609B2 (ja) | トンネル式のクリーンルームのフィルタダクト形成方法 | |
CA1280929C (en) | Clean room | |
JPH0356827Y2 (no) |