JPS6214719U - - Google Patents
Info
- Publication number
- JPS6214719U JPS6214719U JP10412385U JP10412385U JPS6214719U JP S6214719 U JPS6214719 U JP S6214719U JP 10412385 U JP10412385 U JP 10412385U JP 10412385 U JP10412385 U JP 10412385U JP S6214719 U JPS6214719 U JP S6214719U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- transfer device
- reaction gas
- wafer transfer
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000012808 vapor phase Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 6
- 239000012495 reaction gas Substances 0.000 claims 5
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10412385U JPS6214719U (ko) | 1985-07-10 | 1985-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10412385U JPS6214719U (ko) | 1985-07-10 | 1985-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6214719U true JPS6214719U (ko) | 1987-01-29 |
Family
ID=30977324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10412385U Pending JPS6214719U (ko) | 1985-07-10 | 1985-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6214719U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20070090752A (ko) * | 2006-03-02 | 2007-09-06 | 신꼬오덴끼가부시끼가이샤 | 에어 부상 유닛 및 에어 부상 유닛의 제조방법 |
-
1985
- 1985-07-10 JP JP10412385U patent/JPS6214719U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20070090752A (ko) * | 2006-03-02 | 2007-09-06 | 신꼬오덴끼가부시끼가이샤 | 에어 부상 유닛 및 에어 부상 유닛의 제조방법 |