JPS62148574U - - Google Patents
Info
- Publication number
- JPS62148574U JPS62148574U JP3640386U JP3640386U JPS62148574U JP S62148574 U JPS62148574 U JP S62148574U JP 3640386 U JP3640386 U JP 3640386U JP 3640386 U JP3640386 U JP 3640386U JP S62148574 U JPS62148574 U JP S62148574U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- material gas
- grown
- inlet pipe
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 6
- 238000001947 vapour-phase growth Methods 0.000 claims 3
- 125000002524 organometallic group Chemical group 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3640386U JPS62148574U (ko) | 1986-03-12 | 1986-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3640386U JPS62148574U (ko) | 1986-03-12 | 1986-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62148574U true JPS62148574U (ko) | 1987-09-19 |
Family
ID=30846773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3640386U Pending JPS62148574U (ko) | 1986-03-12 | 1986-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62148574U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008060369A (ja) * | 2006-08-31 | 2008-03-13 | Sumitomo Electric Ind Ltd | 気相成長装置、化合物半導体膜及びその成長方法 |
-
1986
- 1986-03-12 JP JP3640386U patent/JPS62148574U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008060369A (ja) * | 2006-08-31 | 2008-03-13 | Sumitomo Electric Ind Ltd | 気相成長装置、化合物半導体膜及びその成長方法 |
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