JPS62145395A - 光電子計数装置 - Google Patents

光電子計数装置

Info

Publication number
JPS62145395A
JPS62145395A JP60286678A JP28667885A JPS62145395A JP S62145395 A JPS62145395 A JP S62145395A JP 60286678 A JP60286678 A JP 60286678A JP 28667885 A JP28667885 A JP 28667885A JP S62145395 A JPS62145395 A JP S62145395A
Authority
JP
Japan
Prior art keywords
sample
light
shielding plate
photoelectron
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60286678A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519195B2 (enrdf_load_stackoverflow
Inventor
Masayuki Uda
応之 宇田
Hiroshi Ishida
博志 石田
Yukio Yamauchi
山内　幸雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hochiki Corp
RIKEN
Original Assignee
Hochiki Corp
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochiki Corp, RIKEN filed Critical Hochiki Corp
Priority to JP60286678A priority Critical patent/JPS62145395A/ja
Publication of JPS62145395A publication Critical patent/JPS62145395A/ja
Publication of JPH0519195B2 publication Critical patent/JPH0519195B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP60286678A 1985-12-19 1985-12-19 光電子計数装置 Granted JPS62145395A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60286678A JPS62145395A (ja) 1985-12-19 1985-12-19 光電子計数装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60286678A JPS62145395A (ja) 1985-12-19 1985-12-19 光電子計数装置

Publications (2)

Publication Number Publication Date
JPS62145395A true JPS62145395A (ja) 1987-06-29
JPH0519195B2 JPH0519195B2 (enrdf_load_stackoverflow) 1993-03-16

Family

ID=17707547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60286678A Granted JPS62145395A (ja) 1985-12-19 1985-12-19 光電子計数装置

Country Status (1)

Country Link
JP (1) JPS62145395A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03108648A (ja) * 1989-09-22 1991-05-08 Hitachi Ltd 表面状態評価方法およびその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03108648A (ja) * 1989-09-22 1991-05-08 Hitachi Ltd 表面状態評価方法およびその装置

Also Published As

Publication number Publication date
JPH0519195B2 (enrdf_load_stackoverflow) 1993-03-16

Similar Documents

Publication Publication Date Title
EP0320425B1 (en) Plasma amplified photoelectron process endpoint detection apparatus
JPS61108148A (ja) 集積回路製造時の中間体の動的テスト装置
JPS62145395A (ja) 光電子計数装置
JPH0376842B2 (enrdf_load_stackoverflow)
JPH0214663B2 (enrdf_load_stackoverflow)
JPH0437390B2 (enrdf_load_stackoverflow)
JP2638914B2 (ja) 露光用ｘ線の強度測定方法
KR20010053095A (ko) 막 두께 측정방법
JPH0376841B2 (enrdf_load_stackoverflow)
JP2971756B2 (ja) 蛍光ガラス線量計測定装置
JP3481031B2 (ja) 二重円筒形オープンカウンター
JPH0526628A (ja) 光電子計測装置
US3477023A (en) Apparatus for measuring the energy and current of an accelerator electron beam including apertured incident and exit electrodes
JP2690572B2 (ja) 表面状態評価方法およびその装置
Delori et al. Further research on the Imperial College cascade image intensifier
JPH0355239Y2 (enrdf_load_stackoverflow)
JP3195046B2 (ja) 全反射状態の検出方法および微量元素の測定装置
JPH0145584B2 (enrdf_load_stackoverflow)
Hammel et al. Elliptical spectrograph/gated microchannel‐plate detector for time‐resolved spectral measurements in the x‐ray region
JPH0573579U (ja) 集積回路製造時の中間体の動的テスト装置
JPH0478144B2 (enrdf_load_stackoverflow)
JPH0326901B2 (enrdf_load_stackoverflow)
JPH06789Y2 (ja) 電子計数装置
JPH0676791A (ja) 集束イオンビーム装置
JPS63133079A (ja) 電子計数装置