Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP55148988ApriorityCriticalpatent/JPS5772073A/ja
Publication of JPS5772073ApublicationCriticalpatent/JPS5772073A/ja
Publication of JPH0145584B2publicationCriticalpatent/JPH0145584B2/ja
G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
G01R31/28—Testing of electronic circuits, e.g. by signal tracer
G01R31/302—Contactless testing
G01R31/305—Contactless testing using electron beams