JPS62143894A - 化合物結晶膜製造装置 - Google Patents
化合物結晶膜製造装置Info
- Publication number
- JPS62143894A JPS62143894A JP61285123A JP28512386A JPS62143894A JP S62143894 A JPS62143894 A JP S62143894A JP 61285123 A JP61285123 A JP 61285123A JP 28512386 A JP28512386 A JP 28512386A JP S62143894 A JPS62143894 A JP S62143894A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- film forming
- forming chamber
- film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61285123A JPS62143894A (ja) | 1986-11-29 | 1986-11-29 | 化合物結晶膜製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61285123A JPS62143894A (ja) | 1986-11-29 | 1986-11-29 | 化合物結晶膜製造装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58030094A Division JPS59156996A (ja) | 1983-02-23 | 1983-02-23 | 化合物結晶膜の製造方法とその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62143894A true JPS62143894A (ja) | 1987-06-27 |
| JPH0151479B2 JPH0151479B2 (enExample) | 1989-11-02 |
Family
ID=17687413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61285123A Granted JPS62143894A (ja) | 1986-11-29 | 1986-11-29 | 化合物結晶膜製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62143894A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5222074A (en) * | 1990-06-05 | 1993-06-22 | Matsushita Electric Industrial Co., Ltd. | Thermal decomposition cell |
-
1986
- 1986-11-29 JP JP61285123A patent/JPS62143894A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5222074A (en) * | 1990-06-05 | 1993-06-22 | Matsushita Electric Industrial Co., Ltd. | Thermal decomposition cell |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0151479B2 (enExample) | 1989-11-02 |
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