JPS62142342A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS62142342A
JPS62142342A JP60284689A JP28468985A JPS62142342A JP S62142342 A JPS62142342 A JP S62142342A JP 60284689 A JP60284689 A JP 60284689A JP 28468985 A JP28468985 A JP 28468985A JP S62142342 A JPS62142342 A JP S62142342A
Authority
JP
Japan
Prior art keywords
film
semiconductor device
capacitive element
nitride film
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60284689A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0464470B2 (enrdf_load_stackoverflow
Inventor
Takashi Okabe
岡部　孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60284689A priority Critical patent/JPS62142342A/ja
Publication of JPS62142342A publication Critical patent/JPS62142342A/ja
Publication of JPH0464470B2 publication Critical patent/JPH0464470B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/66—Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP60284689A 1985-12-17 1985-12-17 半導体装置の製造方法 Granted JPS62142342A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60284689A JPS62142342A (ja) 1985-12-17 1985-12-17 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60284689A JPS62142342A (ja) 1985-12-17 1985-12-17 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62142342A true JPS62142342A (ja) 1987-06-25
JPH0464470B2 JPH0464470B2 (enrdf_load_stackoverflow) 1992-10-15

Family

ID=17681701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60284689A Granted JPS62142342A (ja) 1985-12-17 1985-12-17 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62142342A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177454A (ja) * 1987-01-16 1988-07-21 Rohm Co Ltd 半導体装置の製造方法
US5124761A (en) * 1988-01-22 1992-06-23 Sony Corporation Semiconductor apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018948A (ja) * 1983-07-12 1985-01-31 Nec Corp 半導体集積回路装置
JPS6066850A (ja) * 1983-09-22 1985-04-17 Sony Corp Ｍｉｓ容量素子

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6018948A (ja) * 1983-07-12 1985-01-31 Nec Corp 半導体集積回路装置
JPS6066850A (ja) * 1983-09-22 1985-04-17 Sony Corp Ｍｉｓ容量素子

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177454A (ja) * 1987-01-16 1988-07-21 Rohm Co Ltd 半導体装置の製造方法
US5124761A (en) * 1988-01-22 1992-06-23 Sony Corporation Semiconductor apparatus

Also Published As

Publication number Publication date
JPH0464470B2 (enrdf_load_stackoverflow) 1992-10-15

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