JPS62141792U - - Google Patents

Info

Publication number
JPS62141792U
JPS62141792U JP2891986U JP2891986U JPS62141792U JP S62141792 U JPS62141792 U JP S62141792U JP 2891986 U JP2891986 U JP 2891986U JP 2891986 U JP2891986 U JP 2891986U JP S62141792 U JPS62141792 U JP S62141792U
Authority
JP
Japan
Prior art keywords
movable
slope
inclined guide
table device
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2891986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0338714Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2891986U priority Critical patent/JPH0338714Y2/ja
Priority to NL8700445A priority patent/NL8700445A/nl
Priority to US07/019,223 priority patent/US4739545A/en
Priority to DE19873706327 priority patent/DE3706327C2/de
Priority to GB8704829A priority patent/GB2188263B/en
Publication of JPS62141792U publication Critical patent/JPS62141792U/ja
Application granted granted Critical
Publication of JPH0338714Y2 publication Critical patent/JPH0338714Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP2891986U 1986-02-28 1986-02-28 Expired JPH0338714Y2 (enExample)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2891986U JPH0338714Y2 (enExample) 1986-02-28 1986-02-28
NL8700445A NL8700445A (nl) 1986-02-28 1987-02-23 Positioneertafel voor een samengestelde beweging.
US07/019,223 US4739545A (en) 1986-02-28 1987-02-26 Composite movement table apparatus
DE19873706327 DE3706327C2 (de) 1986-02-28 1987-02-27 Bewegliche Verbundtischanordnung für die fotolithografische Herstellung
GB8704829A GB2188263B (en) 1986-02-28 1987-03-02 Composite movement table apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2891986U JPH0338714Y2 (enExample) 1986-02-28 1986-02-28

Publications (2)

Publication Number Publication Date
JPS62141792U true JPS62141792U (enExample) 1987-09-07
JPH0338714Y2 JPH0338714Y2 (enExample) 1991-08-15

Family

ID=30832330

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2891986U Expired JPH0338714Y2 (enExample) 1986-02-28 1986-02-28

Country Status (1)

Country Link
JP (1) JPH0338714Y2 (enExample)

Also Published As

Publication number Publication date
JPH0338714Y2 (enExample) 1991-08-15

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