JPS6214131Y2 - - Google Patents
Info
- Publication number
- JPS6214131Y2 JPS6214131Y2 JP9958682U JP9958682U JPS6214131Y2 JP S6214131 Y2 JPS6214131 Y2 JP S6214131Y2 JP 9958682 U JP9958682 U JP 9958682U JP 9958682 U JP9958682 U JP 9958682U JP S6214131 Y2 JPS6214131 Y2 JP S6214131Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- heater
- tube
- combustion chamber
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002485 combustion reaction Methods 0.000 claims description 21
- 238000009279 wet oxidation reaction Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 42
- 235000012431 wafers Nutrition 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9958682U JPS597037U (ja) | 1982-07-01 | 1982-07-01 | ウエツト酸化装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9958682U JPS597037U (ja) | 1982-07-01 | 1982-07-01 | ウエツト酸化装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS597037U JPS597037U (ja) | 1984-01-18 |
| JPS6214131Y2 true JPS6214131Y2 (ru) | 1987-04-10 |
Family
ID=30235937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9958682U Granted JPS597037U (ja) | 1982-07-01 | 1982-07-01 | ウエツト酸化装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS597037U (ru) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5666198B2 (ja) * | 2010-08-13 | 2015-02-12 | 株式会社Ｔｉ | 水素調理装置 |
-
1982
- 1982-07-01 JP JP9958682U patent/JPS597037U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS597037U (ja) | 1984-01-18 |
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