JPS62140957A - カセツトの移替装置 - Google Patents
カセツトの移替装置Info
- Publication number
- JPS62140957A JPS62140957A JP27966685A JP27966685A JPS62140957A JP S62140957 A JPS62140957 A JP S62140957A JP 27966685 A JP27966685 A JP 27966685A JP 27966685 A JP27966685 A JP 27966685A JP S62140957 A JPS62140957 A JP S62140957A
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- side reversing
- holding device
- reversing device
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Specific Conveyance Elements (AREA)
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27966685A JPS62140957A (ja) | 1985-12-11 | 1985-12-11 | カセツトの移替装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27966685A JPS62140957A (ja) | 1985-12-11 | 1985-12-11 | カセツトの移替装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62140957A true JPS62140957A (ja) | 1987-06-24 |
| JPH0528498B2 JPH0528498B2 (enExample) | 1993-04-26 |
Family
ID=17614167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27966685A Granted JPS62140957A (ja) | 1985-12-11 | 1985-12-11 | カセツトの移替装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62140957A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5293179A (en) * | 1990-11-20 | 1994-03-08 | Canon Kabushiki Kaisha | Work convey method and apparatus |
-
1985
- 1985-12-11 JP JP27966685A patent/JPS62140957A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5293179A (en) * | 1990-11-20 | 1994-03-08 | Canon Kabushiki Kaisha | Work convey method and apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0528498B2 (enExample) | 1993-04-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0355983B2 (enExample) | ||
| US3272350A (en) | Method and apparatus for semiconductor wafer handling | |
| TWI262165B (en) | Device and method for transporting wafer-shaped articles | |
| US4806057A (en) | Automatic wafer loading method and apparatus | |
| JPH03125453A (ja) | 半導体ウエハ移送装置 | |
| JPH0159352B2 (enExample) | ||
| JPS62140957A (ja) | カセツトの移替装置 | |
| JPS62136428A (ja) | 角形マスク基板移送機構 | |
| JPH11233584A (ja) | 基板搬送処理装置 | |
| JP6051197B2 (ja) | マルチプルアームを備えた搬送ロボット | |
| JPS5758330A (en) | Wafer transferring apparatus | |
| JPS6233437A (ja) | 半導体ウエハの整列装置 | |
| CN221792724U (zh) | 一种用于半导体工艺设备的双臂传送机器人 | |
| JP2651859B2 (ja) | 半導体ウエハー処理装置 | |
| JPS5830124A (ja) | 気相成長装置用ウエハ−立替装置 | |
| TW531482B (en) | Single-piece type conveyor for semiconductor wafer and liquid-crystal substrate and robot | |
| JP2001031212A (ja) | 自動倉庫 | |
| JP3413567B2 (ja) | 基板搬送処理装置及び基板搬送処理方法 | |
| JP3024005B2 (ja) | 搬送方法及び搬送装置 | |
| JPH02184045A (ja) | 並べ換え方法及び並べ換え装置 | |
| JPH04361551A (ja) | 半導体ウエハの搬送装置 | |
| JPS61247047A (ja) | 円板状部材の整列装置 | |
| JPS61131465A (ja) | ウエハ移換え装置 | |
| JPS63122234A (ja) | ウエハ移し替え装置 | |
| JPH0424915A (ja) | 搬送装置 |