JPS6213921U - - Google Patents
Info
- Publication number
- JPS6213921U JPS6213921U JP10484085U JP10484085U JPS6213921U JP S6213921 U JPS6213921 U JP S6213921U JP 10484085 U JP10484085 U JP 10484085U JP 10484085 U JP10484085 U JP 10484085U JP S6213921 U JPS6213921 U JP S6213921U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- automatic
- transfer
- manufacturing
- devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10484085U JPS6213921U (cs) | 1985-07-11 | 1985-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10484085U JPS6213921U (cs) | 1985-07-11 | 1985-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6213921U true JPS6213921U (cs) | 1987-01-28 |
Family
ID=30978705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10484085U Pending JPS6213921U (cs) | 1985-07-11 | 1985-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6213921U (cs) |
-
1985
- 1985-07-11 JP JP10484085U patent/JPS6213921U/ja active Pending
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