JPS6280334U - - Google Patents
Info
- Publication number
- JPS6280334U JPS6280334U JP17094585U JP17094585U JPS6280334U JP S6280334 U JPS6280334 U JP S6280334U JP 17094585 U JP17094585 U JP 17094585U JP 17094585 U JP17094585 U JP 17094585U JP S6280334 U JPS6280334 U JP S6280334U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- wafer carrier
- rotated
- processing device
- certain angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Specific Conveyance Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17094585U JPS6280334U (cs) | 1985-11-08 | 1985-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17094585U JPS6280334U (cs) | 1985-11-08 | 1985-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6280334U true JPS6280334U (cs) | 1987-05-22 |
Family
ID=31106126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17094585U Pending JPS6280334U (cs) | 1985-11-08 | 1985-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6280334U (cs) |
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1985
- 1985-11-08 JP JP17094585U patent/JPS6280334U/ja active Pending