JPS62137522A - 流量センサ - Google Patents
流量センサInfo
- Publication number
- JPS62137522A JPS62137522A JP60277920A JP27792085A JPS62137522A JP S62137522 A JPS62137522 A JP S62137522A JP 60277920 A JP60277920 A JP 60277920A JP 27792085 A JP27792085 A JP 27792085A JP S62137522 A JPS62137522 A JP S62137522A
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- heat
- rate sensor
- resistors
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 25
- 239000011810 insulating material Substances 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 abstract description 11
- 238000001514 detection method Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 3
- 239000000919 ceramic Substances 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000012530 fluid Substances 0.000 description 16
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60277920A JPS62137522A (ja) | 1985-12-12 | 1985-12-12 | 流量センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60277920A JPS62137522A (ja) | 1985-12-12 | 1985-12-12 | 流量センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62137522A true JPS62137522A (ja) | 1987-06-20 |
| JPH0560528B2 JPH0560528B2 (enrdf_load_stackoverflow) | 1993-09-02 |
Family
ID=17590128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60277920A Granted JPS62137522A (ja) | 1985-12-12 | 1985-12-12 | 流量センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62137522A (enrdf_load_stackoverflow) |
-
1985
- 1985-12-12 JP JP60277920A patent/JPS62137522A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0560528B2 (enrdf_load_stackoverflow) | 1993-09-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |