JPS62136826A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS62136826A
JPS62136826A JP27703785A JP27703785A JPS62136826A JP S62136826 A JPS62136826 A JP S62136826A JP 27703785 A JP27703785 A JP 27703785A JP 27703785 A JP27703785 A JP 27703785A JP S62136826 A JPS62136826 A JP S62136826A
Authority
JP
Japan
Prior art keywords
layer
semiconductor
etching
gaas
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27703785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0319695B2 (enrdf_load_stackoverflow
Inventor
Masahisa Suzuki
雅久 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP27703785A priority Critical patent/JPS62136826A/ja
Publication of JPS62136826A publication Critical patent/JPS62136826A/ja
Publication of JPH0319695B2 publication Critical patent/JPH0319695B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP27703785A 1985-12-11 1985-12-11 半導体装置の製造方法 Granted JPS62136826A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27703785A JPS62136826A (ja) 1985-12-11 1985-12-11 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27703785A JPS62136826A (ja) 1985-12-11 1985-12-11 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62136826A true JPS62136826A (ja) 1987-06-19
JPH0319695B2 JPH0319695B2 (enrdf_load_stackoverflow) 1991-03-15

Family

ID=17577897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27703785A Granted JPS62136826A (ja) 1985-12-11 1985-12-11 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62136826A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5842249A (en) * 1992-10-31 1998-12-01 Sato; Masanori Toothbrush
JP2023041394A (ja) * 2021-09-13 2023-03-24 株式会社豊田中央研究所 酸化ガリウム系半導体基板の表面処理方法および半導体装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5198973A (en) * 1975-02-26 1976-08-31 Handotaisochino seizohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5198973A (en) * 1975-02-26 1976-08-31 Handotaisochino seizohoho

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5842249A (en) * 1992-10-31 1998-12-01 Sato; Masanori Toothbrush
US6209164B1 (en) 1992-10-31 2001-04-03 Masanori Sato Toothbrush and electric toothbrush
US6334232B1 (en) 1992-10-31 2002-01-01 Masanori Sato Toothbrush and electric toothbrush
JP2023041394A (ja) * 2021-09-13 2023-03-24 株式会社豊田中央研究所 酸化ガリウム系半導体基板の表面処理方法および半導体装置

Also Published As

Publication number Publication date
JPH0319695B2 (enrdf_load_stackoverflow) 1991-03-15

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