JPS62135432U

JPS62135432U -

Info

Publication number: JPS62135432U
Application number: JP2358586U
Authority: JP
Priority date: 1986-02-20
Filing date: 1986-02-20
Publication date: 1987-08-26

Description

[Brief explanation of drawings]

第１図は本考案の第１の実施例を示す断面図、
第２図はダイ突き上げ時の状態を示す拡大説明図
、第３図は第１，２図におけるプランジアツプヘ
ツドの斜視図、第４図及び第５図は本考案の第２
の実施例及び第３の実施例におけるプランジアツ
プヘツドの斜視図、第６図はプランジアツプヘツ
ド上に横たわるノンエキスパンドウエハの平面図
、第７図は従来のプランジアツプヘツド等を示す
第６図におけるＡ―Ａ断面図、第８図はダイ突き
上げ時の状態を示す拡大説明図である。１……ノンエキスパンドウエハ、２……シート
、３……ウエハ、４……ダイ、４ａ……ダイ、５
……プランジアツプヘツド、５ａ……上面、６…
…ツール、７……突き上げピン、８……空間、９
……真空吸引用穴、１０……環状フレーム、１１
……環状部材、１２……穴、１３……ダイの側端
面、１４……ダイの側端面、１５……エツジ部、
１６……エツジ部、２０，２０′，２０″……平
面、２１……円錐面（テーパ面）、２２，２２′
……角錐面（テーパ面）、２３……稜線、２４…
…環状溝。 FIG. 1 is a sectional view showing a first embodiment of the present invention;
Figure 2 is an enlarged explanatory view showing the state when the die is pushed up, Figure 3 is a perspective view of the plunge head in Figures 1 and 2, and Figures 4 and 5 are the second part of the present invention.
FIG. 6 is a plan view of a non-expandable wafer lying on the plunge top, and FIG. 7 is a perspective view of the plunge top in the third embodiment and FIG. The AA sectional view and FIG. 8 are enlarged explanatory views showing the state when the die is pushed up. 1...Non-expanded wafer, 2...Sheet, 3...Wafer, 4...Die, 4a...Die, 5
...Plunge top head, 5a...Top surface, 6...
...Tool, 7...Push-up pin, 8...Space, 9
...Vacuum suction hole, 10...Annular frame, 11
... Annular member, 12 ... Hole, 13 ... Side end surface of die, 14 ... Side end surface of die, 15 ... Edge portion,
16... Edge portion, 20, 20', 20''... Plane, 21... Conical surface (tapered surface), 22, 22'
...Pyramidal surface (tapered surface), 23...Ridge line, 24...
...Annular groove.

Claims

[Claims for Utility Model Registration] A non-expandable wafer 1 obtained by cutting and dividing a wafer 3 stuck onto a sheet 2 into a plurality of dies 4 with an extremely small gap △ is placed on the top surface of a plunge head 5. Each divided die 4 is successively pushed up with a push-up pin 7 provided inside the plunge up head, and is sucked with a tool 6 located directly above the push-up pin and removed from the sheet 2. In a die bonder designed to peel off, the shape of the upper end of the plunge up head is as follows:
It has a shape having a flat surface 20 having approximately the same side or diameter as one die 4, and a tapered surface 21 that continues around the periphery of the flat surface 20. A plunge head for a die bonder, characterized in that it is provided with an annular groove 24 for suctioning a die.