JPS62131159A - Refrigerator - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a He refrigerating device particularly suitable for use in performing characteristic tests such as electrical and optical measurements.

Conventional technology Conventionally, a cryostand using a He refrigerator as shown in Fig. 2 has been adopted as a refrigeration system used for characteristic tests such as electrical and optical measurements. Measurement in the temperature range is possible.

To explain with a diagram, 1 generates cold heat. The main body of the refrigerator, 2 is a base flange for equipment such as a vacuum exhaust port, temperature sensor installation port, hermetic seal installation port, etc., 3 is a first-stage cold end of the refrigerator 1, and a second-stage cold end portion 5 is heated. Temporary shielding 4 is installed. The frozen object mounting bases 6 attached to the second-stage cold end 5 are designed so that the sample can be fixed in an appropriate manner after being electrically stabilized as necessary. It is an optical window made of a window material corresponding to the wavelength Vr, and is appropriately adopted depending on the type of measurement. Reference numeral 8 is a heater attached to a mounting base for objects to be frozen.The heater has a capacity commensurate with the unitization power of refrigerator 1, and is used for temperature control.1-9 is an outer cylinder, and 10 is for replacing objects to be frozen. It has an easy-to-remove structure and a bottom lid of the outer cylinder.

The materials used to construct the above-mentioned refrigeration equipment include austenitic stainless steel, copper, and aluminum due to their low-temperature properties and heat conduction.In particular, copper is used for the attachment parts of objects to be frozen. Common.

In the conventional technology described above, as the shape of the object to be frozen becomes sharper, the attachment part of the object to be frozen must also become stiffer, especially in the range of 300 to 77 degrees where the specific heat of copper is large. The heat capacity of the product was low, freezing took a long time, and workability was lacking.

In addition to the above-mentioned drawbacks, when replacing the frozen object and performing repeated tests, it is necessary to increase the temperature of the refrigerator itself.
It was not possible to conduct the test multiple times per day.

The object of the present invention is to eliminate the above-mentioned drawbacks of the prior art.

According to the present invention, a refrigeration system including a freezing chamber including an attachment part for objects to be frozen and a cold heat generation source of a He refrigerator is characterized in that a refrigerant heat exchanger for accelerated cooling of liquid nitrogen or the like is provided. Refrigeration equipment is provided.

In a preferred embodiment of the present invention, the freezing chamber including the attachment part of the object to be frozen, the refrigerant heat exchanger part such as liquid nitrogen for accelerated cooling, and the cold heat generation source of the He refrigerator are arranged separately. (Prepare an expression.

Effect This is particularly effective when a He refrigerator with a small refrigerating capacity is used when freezing an object to be frozen and an object having a large heat capacity at the attachment part of the object to be frozen.

By providing a heat exchanger for a refrigerant such as liquefied nitrogen, the time required to freeze from room temperature to around the liquefied nitrogen temperature can be significantly shortened.

A freezing chamber including a mounting part of a frozen object that does not impede the vibration isolation function even for the mounting part of a frozen object with a vibration isolation structure, and a refrigerant heat exchanger such as liquefied nitrogen for accelerated cooling. Part and H
g By isolating the cold heat generation source of the refrigerator and creating a separate vacuum in the refrigerator room, only the parts to be frozen and the refrigerant heat exchanger part can be heated while operating the He refrigerator and opened to the atmosphere. The object to be frozen can be replaced at the same time, and thereafter it can be quickly frozen to the desired temperature, greatly improving work efficiency.

Example An embodiment of the invention will be described with reference to FIG.

The outer shell 9 and base flange 2 of the refrigeration system are equipped with an odor stack exhaust device temperature measurement system, an electrical/optical measurement system, etc. (not shown). The He refrigerator 1 and the counterbalance 11 are suspended from the base flange 2 through vibration-proofing bellows 12, and are brought into a floating state by the odor exhaust. The purpose of the stopper 13 is to support the refrigerator at atmospheric pressure and protect the anti-vibration bellows, and by providing an appropriate gap,
During operation, the refrigerator is completely disconnected from the refrigerator.

In the cold head section 5 of the He refrigerator 1, a vibration isolation wire 18 for cold and heat transfer made of a thin copper wire bundle is installed and brought into thermal contact with a refrigerant heat exchanger section 19, which is a component of the present invention. The cold heat generated by the refrigerator is transmitted via the vibration isolation wire 18. The refrigerant heat exchanger section 19 includes, in addition to the object to be frozen mount 6, a temperature adjustment heater 8, and refrigerant supply piping 14.1.
6, a refrigerant supply valve 15 and a gas blow valve 17 are connected.

It goes without saying that the refrigerant supply pipes 14 and 16 are equipped with a bellows section, etc., and are provided with anti-vibration and low-temperature shrinkage measures. It is introduced from flange 2.

The refrigerant heat exchanger section 19 and the frozen object mounting base 6, which are electrically insulated as necessary, are attached to the outer shell 9 separated from the vibration source by the partition wall 20.

The partition wall 20 is made of a low heat conductive material such as a thin stainless steel tube or an FRP tube, and has a vacuum-resistant structure in order to minimize heat intrusion into the frozen object mounting base 6. The position adjustment bellows 21 can be used, for example, between the mounting surface of the frozen object and the XY (not shown)
It can be used to adjust the measurement position of an optical/electrical measurement system mounted on the traveling system, and the adjustment port 22 allows fine adjustment.

In addition, the outer shell 9 includes a light entrance window 7 for optical measurement, a canopy 10 for exchanging objects to be frozen, and a microscope viewing window 23 for positioning.
, blind cover 24 etc. of the window are equipped.

If the refrigeration apparatus has the above configuration, the object to be frozen is fixed to the mounting base and then evacuated to about 10'-3 toτr. He
The refrigerator 1 is activated to start cooling, and at the same time, liquefied nitrogen is supplied from a liquefied nitrogen gas source (not shown) through the flow path of the piping 14, refrigerant supply valve 15, refrigerant heat exchanger section 19, gas blow valve 17, and blow piping 16. By this, the frozen object mounting base 6
can be easily quenched to liquefied nitrogen temperature. The specific heat of copper varies greatly depending on the temperature range, as shown below. Therefore, since the heat capacity from room temperature to liquefied nitrogen temperature is about 10 times greater than the heat capacity in the lower temperature range, this cooling method is extremely effective. Since the heat capacity is sufficiently high in this region, it can be easily frozen to any desired temperature up to I'7A degrees depending on the refrigerating capacity of the He refrigerator.

300K O-35J/aK 77K O-2J/rtK 20K O,008J/gK Also, this device has a partition wall 20 shown in FIG. It is also possible to isolate the odor from the refrigerator room where the source is and create a separate odor station.

As a result, it becomes possible to raise the temperature of the refrigerant heat exchanger section 19 and the frozen object mounting base 6 to room temperature by the heater 8 while the He refrigerator 1 is in operation, and returns the freezing chamber to the atmosphere to cool the frozen object. It became possible to exchange things.

Effects of the Invention By using a refrigerant heat exchanger for accelerated cooling of liquid nitrogen, etc., rapid cooling to the liquid nitrogen temperature is possible, and this is particularly effective for objects with large heat capacity in the temperature range such as copper. However, there is no need to increase the refrigerating capacity of the He refrigerating machine itself, and rapid refrigerating is possible, increasing work efficiency and reducing costs.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram of a refrigeration system according to the present invention, and FIG. 2 is a schematic diagram showing an example of a conventional refrigeration system. l; Refrigerator, 2; Base flange, 3; 1st stage cold end, 4; Heat shield, 5; 2nd stage cold end, 6;
Frozen object attachment part, 7; Optical window, 8; Heater, 9; Outer cylinder (outer shell), 10; Outer cylinder lower-i, 11; Counter balance, 12; Anti-Tx bellows, 13; Stopper, 14 .16; Refrigerant supply piping, 15.17; Refrigerant supply valve, 18; Protection wire for cold heat transfer, 19; Refrigerant heat exchanger section, 20; Partition wall, 21; Bellows for position adjustment, 22;
Adjustment bolt, 23; Microscope viewing window, 24; Blind lid patent applicant Osaka Sanso Kogyo Co., Ltd. (1 other person) (5 other people) Figure 1 Section 2 (Attachment) Procedures Amendment December 1985 Yo Lu Patent Application No. 1985 Patent Class 2 filed on December 4, 1985, Name of Invention Refrigeration Device 6 Relationship to the Case of Person Who Amends Patent Applicant Address Name Osaka Sanso Kogyo Co., Ltd. (1 other person) 4. Agent 5, subject of amendment 1, amended the scope of claims as follows. (1) A refrigeration system including a freezing chamber including an attachment part for objects to be frozen and a cold heat generation source of a He refrigerator, characterized by a port equipped with a refrigerant heat exchanger for accelerated cooling of liquid nitrogen, etc. Refrigeration equipment. (2) A refrigerator room is provided in which the freezing room containing the attachment part of the frozen object, the refrigerant heat exchanger part such as liquid nitrogen for accelerated cooling, and the cold heat generation source of the He refrigerator are placed in isolation. 2. The specification has been amended as shown in the table below. Page line Before amendment After amendment
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Claims (2)

[Claims] (1) A refrigeration system including a freezing chamber including an attachment part for objects to be frozen and a cold heat generation source of a He refrigerator, characterized in that a refrigerant heat exchanger for accelerated cooling of liquid nitrogen or the like is provided. . (2) A refrigerator room is provided in which the freezing room containing the attachment part for the frozen object, the refrigerant heat exchanger part for accelerated cooling such as liquid nitrogen, and the cold heat generation source of the He freezing plate are arranged separately. A refrigeration system according to claim 1, characterized in that: