JP3096969B2 - Reliquefaction equipment for liquefied gas for cooling of physics and chemistry equipment - Google Patents

Reliquefaction equipment for liquefied gas for cooling of physics and chemistry equipment

Info

Publication number
JP3096969B2
JP3096969B2 JP5262997A JP5262997A JP3096969B2 JP 3096969 B2 JP3096969 B2 JP 3096969B2 JP 5262997 A JP5262997 A JP 5262997A JP 5262997 A JP5262997 A JP 5262997A JP 3096969 B2 JP3096969 B2 JP 3096969B2
Authority
JP
Japan
Prior art keywords
liquefied gas
cooling
tank
reliquefaction
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP5262997A
Other languages
Japanese (ja)
Other versions
JPH10246547A (en
Inventor
圭司 秦
正人 足立
文五 近藤
悦治 川口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwatani Industrial Gases Corp
Iwatani Corp
Original Assignee
Iwatani Industrial Gases Corp
Iwatani Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwatani Industrial Gases Corp, Iwatani Corp filed Critical Iwatani Industrial Gases Corp
Priority to JP5262997A priority Critical patent/JP3096969B2/en
Publication of JPH10246547A publication Critical patent/JPH10246547A/en
Application granted granted Critical
Publication of JP3096969B2 publication Critical patent/JP3096969B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する分野】本発明は、核磁気共鳴装置(NM
R)等、液化ガスを冷却源として使用している理化学機
器での液化ガスの再液化装置に関する。
[0001] The present invention relates to a nuclear magnetic resonance apparatus (NM).
The present invention relates to an apparatus for reliquefying a liquefied gas in a physicochemical apparatus using a liquefied gas as a cooling source, such as R).

【0002】[0002]

【従来の技術】例えば、SCM−NMRでは、検出能力
を向上させるために、液体ヘリウム槽内の液体ヘリウム
に超電導マグネットを浸漬して超電導マグネットを冷却
し、液体ヘリウム槽(冷却冷媒ガス槽)に侵入する外部か
らの熱を抑制するために、液体ヘリウム槽の外周に液体
窒素槽(冷媒シールドガス槽)を配置した構成になってい
る。
2. Description of the Related Art In SCM-NMR, for example, in order to improve detection capability, a superconducting magnet is immersed in liquid helium in a liquid helium tank to cool the superconducting magnet, and then to a liquid helium tank (cooling refrigerant gas tank). In order to suppress heat from entering from outside, a liquid nitrogen tank (refrigerant shield gas tank) is arranged around the outer periphery of the liquid helium tank.

【0003】上述の構造からなる理化学機器では、液体
ヘリウムは液体窒素によって外部から入熱が抑制されて
いるのに対し、液体窒素には外部からの熱が作用するこ
とから液体ヘリウムの消費量よりも液体窒素の消費量が
格段に多くなる。この結果、液体窒素の補給作業を頻繁
に行わなければならないが、この液体窒素の補給作業の
たびに理化学機器の運転を停止させなければならず、理
化学機器を使っての作業効率が低下するという問題があ
った。
In the physics and chemistry equipment having the above-described structure, the heat input of liquid helium from the outside is suppressed by liquid nitrogen, whereas the heat from the outside acts on the liquid nitrogen. However, the consumption of liquid nitrogen is significantly increased. As a result, liquid nitrogen replenishment work must be performed frequently, but the operation of the physics and chemistry equipment must be stopped every time this liquid nitrogen replenishment work is performed, and the work efficiency using the physics and chemistry equipment is reduced. There was a problem.

【0004】そこで、本出願人は、理化学機器に配置し
た冷媒シールドガス槽と、槽内を極低温冷凍機の寒冷発
生部をで冷却可能にした再液化槽とを、再液化槽から冷
媒シールドガス槽に向かう連続する下り傾斜に配置した
可撓性断熱管で連通接続して、低温維持用液化ガス(冷
媒シールドガス)の補給作業をなくし、あるいは、冷却
作業用液化ガス(冷却冷媒ガス)の補給間隔と一致させら
れるようにする液化ガス再液化装置を先に提案した(特
開平8−327171号)
Accordingly, the present applicant has established a refrigerant shield gas tank disposed in a physics and chemistry apparatus and a reliquefaction tank in which the inside of the tank can be cooled by a cold generation part of a cryogenic refrigerator. Communicate and connect with flexible insulated pipes arranged on a continuous downward slope toward the gas tank to eliminate replenishment of low-temperature maintaining liquefied gas (refrigerant shielding gas) or liquefied gas for cooling work (cooling refrigerant gas) Liquefied gas reliquefaction apparatus that can be made to coincide with the replenishment interval of the liquefied gas was previously proposed (Japanese Patent Laid-Open No. 8-327171).

【0005】[0005]

【発明が解決しようとする課題】ところが先に提案した
前記液化ガス再液化装置では、冷却用液化ガス給排管の
外周を断熱外層管で被覆した可撓性断熱管で再液化槽と
冷媒シールドガス槽とを連通接続するに当たり、冷媒シ
ールドガス槽の冷媒液注入通路には冷却用液化ガス給排
管の先端部だけが突入し、断熱外層管は冷媒液注入通路
の外側部分に位置する冷却用液化ガス給排管しか被覆し
ていなかった。
However, in the liquefied gas reliquefaction apparatus proposed above, the reliquefaction tank and the refrigerant shield are formed by a flexible heat insulating pipe in which the outer periphery of the cooling liquefied gas supply / discharge pipe is covered with a heat insulating outer layer pipe. In communicating with the gas tank, only the distal end of the liquefied gas supply / discharge pipe for cooling protrudes into the refrigerant liquid injection passage of the refrigerant shield gas tank, and the heat insulating outer layer pipe is located at the outer portion of the refrigerant liquid injection passage. Only the liquefied gas supply and exhaust pipe was covered.

【0007】このため、冷媒シールドガス槽の冷媒液注
入通路内に外部からの入熱による温度勾配が生じてお
り、それに伴い冷却用液化ガス給排管内を流下してくる
再液化した冷媒シールドガスが気化することがあり、再
液化した冷媒シールドガスが冷媒シールドガス槽に十分
返送されないという問題があつた。本発明はこのような
点に着目してなされたもので、極低温冷凍機を使用して
冷媒シールドガスを再液化させて理科学機器の冷却用液
化ガス槽に返送するにあたり、返送される再液化した冷
却用液化ガスの気化を抑制することにより、再液化冷却
用液化ガスを冷却用液化ガス槽に液状体で確実に返送す
ることのできる液化ガス再液化装置を提供することを目
的とする。
[0007] Therefore, a temperature gradient is generated in the refrigerant liquid injection passage of the refrigerant shield gas tank due to heat input from the outside, and the re-liquefied refrigerant shield gas flowing down the cooling liquefied gas supply / discharge pipe accordingly. May be vaporized, and the re-liquefied refrigerant shield gas is not sufficiently returned to the refrigerant shield gas tank. The present invention has been made in view of such a point, and when the refrigerant shield gas is reliquefied using a cryogenic refrigerator and returned to the cooling liquefied gas tank of the scientific equipment, the recirculated refrigerant gas is returned. An object of the present invention is to provide a liquefied gas reliquefaction apparatus capable of reliably returning a reliquefied cooling liquefied gas as a liquid to a liquefied cooling gas tank by suppressing the vaporization of the liquefied liquefied cooling gas. .

【0008】[0008]

【課題を解決するための手段】上述の目的を達成するた
めに本発明は、再液化槽と冷却用液化ガス槽とを連通接
続する可撓性断熱管を構成している断熱外層管の冷却用
液化ガス槽側での端部を中間部分での外径寸法よりも小
径に形成して冷却用液化ガス槽の冷媒液注入通路に突入
するように形成するとともに、可撓性断熱管を構成して
いる冷却用液化ガス給排管の冷却用液化ガス槽側での端
部を冷却用液化ガス槽の冷媒液注入通路の下端部分に位
置させるように構成したことを特徴としている。
SUMMARY OF THE INVENTION In order to achieve the above-mentioned object, the present invention provides a method for cooling a heat-insulating outer layer tube constituting a flexible heat-insulating tube for connecting a reliquefaction tank and a liquefied gas tank for cooling. The end on the side of the liquefied gas tank for cooling is formed to have a smaller diameter than the outer diameter of the middle part, and is formed so as to protrude into the refrigerant liquid injection passage of the liquefied gas tank for cooling, and constitutes a flexible heat insulating tube. The cooling liquefied gas supply / discharge pipe has an end on the cooling liquefied gas tank side located at the lower end portion of the refrigerant liquid injection passage of the cooling liquefied gas tank.

【0009】[0009]

【作用】本発明では、可撓性断熱管を構成している断熱
外層管の冷却用液化ガス槽側での端部を中間部分での外
径寸法よりも小径に形成して冷却用液化ガス槽の冷媒液
注入通路に十分差し込めるように形成してあるので、可
撓性断熱間内を戻される冷却用液化ガスが冷却用液化ガ
ス槽における冷媒液注入通路での温度勾配に影響される
ことを抑制することができ、再液化された冷却用液化ガ
スの蒸発を抑制することができることになる。また、請
求項2に記載したように断熱管の冷媒液注入通路突入部
分の外面を電気絶縁処理した場合には、可撓性断熱管を
介して伝達される電気ノイズが理化学機器に伝導される
ことを抑制することができる。
According to the present invention, the end of the heat insulating outer layer tube constituting the flexible heat insulating tube on the side of the cooling liquefied gas tank is formed to have a smaller diameter than the outer diameter of the intermediate portion. Since the cooling liquefied gas is formed so as to be sufficiently inserted into the refrigerant liquid injection passage of the tank, the cooling liquefied gas returned inside the flexible insulation is affected by the temperature gradient in the refrigerant liquid injection passage in the cooling liquefied gas tank. Therefore, the evaporation of the reliquefied cooling liquefied gas can be suppressed. Further, when the outer surface of the portion of the heat-insulating pipe that enters the refrigerant liquid injection passage is electrically insulated as described in claim 2, the electric noise transmitted through the flexible heat-insulating pipe is transmitted to the physical and chemical equipment. Can be suppressed.

【0010】[0010]

【発明の実施の形態】図面は本発明の実施例を示し、図
1はSCM−NMRからの液体窒素を再液化する場合で
の概略構成図である。この再液化装置は、気化ガスの発
生源となるSCM−NMR(1)と、再液化槽(2)と、S
CM−NMR(1)の冷媒シールドガスである液体窒素の
貯蔵槽(3)と再液化槽(2)とを連通する可撓性断熱管
(4)と、再液化槽(2)の内部に低温発生部(5)を突入さ
せている極低温冷凍機(6)とで構成してある。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 shows an embodiment of the present invention, and FIG. 1 is a schematic structural diagram in the case where liquid nitrogen from SCM-NMR is reliquefied. This reliquefaction apparatus includes an SCM-NMR (1) serving as a source of vaporized gas, a reliquefaction tank (2),
A flexible heat insulating pipe for communicating a storage tank (3) for liquid nitrogen, which is a refrigerant shielding gas of CM-NMR (1), and a reliquefaction tank (2).
(4) and a cryogenic refrigerator (6) having a low-temperature generating section (5) inserted into the reliquefaction tank (2).

【0011】SCM−NMR(1)は、真空断熱構造に形
成したケーシング内に、冷却冷媒である液体ヘリウムの
貯蔵槽(7)と前述の冷媒シールドガスである液体窒素の
貯蔵槽(3)とが内外に位置する状態で配置してあり、液
体ヘリウム貯蔵槽(7)内の液体ヘリウムに超電導マグネ
ット(9)が浸漬させてある。そして、液体ヘリウム貯蔵
槽(7)を取り囲む状態に配置した液体窒素貯蔵槽(3)
は、外部からの熱が液体ヘリウム貯蔵槽(7)に伝達され
ることを抑制する熱シールド媒体として作用している。
[0011] The SCM-NMR (1) includes a storage tank (7) for liquid helium as a cooling refrigerant and a storage tank (3) for liquid nitrogen as a refrigerant shielding gas in a casing formed in a vacuum insulation structure. The superconducting magnet (9) is immersed in the liquid helium in the liquid helium storage tank (7). And a liquid nitrogen storage tank (3) arranged so as to surround the liquid helium storage tank (7).
Functions as a heat shield medium that suppresses transfer of heat from the outside to the liquid helium storage tank (7).

【0012】再液化槽(2)は真空断熱構造に構成してあ
り、SCM−NMRを配置している部屋に支柱(10)等の
固定構造体に防振具(11)を介して支持してある。そし
て、この再液化槽(2)の内側壁(12)における下端から一
定高さ上方の個所から冷却用液化ガス給排管(13)が斜め
下向きの状態でケーシング外まで導出してある。このた
め、再液化槽(2)内の底部には再液化ガス貯留部(14)が
形成され、冷却用液化ガス給排管(13)が冷媒シールドガ
スの導出管となる。そして、再液化槽(2)の上面開口部
はフランジ(15)で閉塞してあり、このフランジ(15)を貫
通する状態で前記支柱(10)に固定支持させた極低温冷凍
機(6)のコールドヘッド(16)が配置してある。このフラ
ンジ(15)から圧力導出管(17)が導出してあり、この圧力
導出管(17)にリリーフ弁(18)、圧力計(19)を装着してあ
る。
The reliquefaction tank (2) has a vacuum insulation structure, and is supported on a fixed structure such as a column (10) via a vibration isolator (11) in a room where the SCM-NMR is arranged. It is. A cooling liquefied gas supply / discharge pipe (13) is drawn out of the casing in a state obliquely downward from a location above the lower end of the inner wall (12) of the reliquefaction tank (2) by a certain height. For this reason, a reliquefied gas storage part (14) is formed at the bottom in the reliquefaction tank (2), and the cooling liquefied gas supply / discharge pipe (13) serves as an outlet pipe for the refrigerant shield gas. The upper opening of the reliquefaction tank (2) is closed by a flange (15), and the cryogenic refrigerator (6) fixedly supported on the column (10) while penetrating the flange (15). Cold head (16) is arranged. A pressure outlet pipe (17) is led out of the flange (15), and a relief valve (18) and a pressure gauge (19) are mounted on the pressure outlet pipe (17).

【0013】極低温冷凍機(6)は圧縮機ユニット(20)と
前述のコールドヘッド(16)とからなり、コールドヘッド
(16)の下端部に形成した寒冷発生部(5)を再液化槽(2)
の内部に突入させている。そして、圧縮機ユニット(20)
は、圧縮機(21)の吐出ポートとコールドヘッド(16)の流
入ポートとを接続する高圧ガス供給路(22)に冷却器(2
3)、油分離器(24)、油吸着器(25)を直列に配置し、油分
離器(24)と油吸着器(25)との間の高圧ガス供給路(22)を
コールドヘッド(16)の返送ポートと圧縮機(21)の吸込ポ
ートとを接続している低圧ガス返送路(26)に保圧弁(27)
を介して接続して構成してある。
The cryogenic refrigerator (6) comprises a compressor unit (20) and the aforementioned cold head (16).
The cold generating part (5) formed at the lower end of (16) is reliquefied (2)
Into the interior. And the compressor unit (20)
The cooler (2) is connected to the high pressure gas supply passage (22) connecting the discharge port of the compressor (21) and the inflow port of the cold head (16).
3), an oil separator (24) and an oil adsorber (25) are arranged in series, and a high-pressure gas supply path (22) between the oil separator (24) and the oil adsorber (25) is connected to a cold head ( A pressure-retaining valve (27) is connected to the low-pressure gas return path (26) connecting the return port of (16) and the suction port of the compressor (21).
And is connected via a.

【0014】可撓性断熱管(4)は、再液化槽(2)から一
体に連出してあり、なまし銅管又は薄肉ステンレス管等
の非磁性体製のパイプで構成したシールドガス給排管(1
3)の外周をなまし銅管又は金属可撓管等で形成した外層
管(29)で被覆し、シールドガス給排管(28)と外層管(29)
との間の空間を再液化槽(2)の真空空間に連通させて真
空断熱空間に形成してあり、全体が再液化槽(2)からS
CM−NMR(1)に向かって連続する下り傾斜となる状
態に配置してある。そして、シールドガス給排管(28)の
下端部分はSCM−NMR(1)の液体窒素貯蔵槽(3)に
連通する状態に形成された液体窒素注入通路(30)の上面
開口部から内部に突入しており、シールドガス給排管(2
8)の下端は、液体窒素注入通路(30)と液体窒素貯蔵槽
(3)との連通口部分に位置するようにしてある。そし
て、可撓性断熱管(4)及び再液化槽(2)の冷却用液化ガ
ス給排管(13)で構成されている液化ガス導出系はその軸
芯が水平線に対して15度の傾斜角度を持つ状態に配置
してある。
The flexible heat insulating pipe (4) is integrally extended from the reliquefaction tank (2), and is a shield gas supply / discharge made of a pipe made of a non-magnetic material such as an annealed copper pipe or a thin stainless steel pipe. Tube (1
The outer periphery of 3) is covered with an outer layer pipe (29) formed of a smoothed copper pipe or a metal flexible pipe, etc., and a shielding gas supply / discharge pipe (28) and an outer layer pipe (29)
Is connected to the vacuum space of the reliquefaction tank (2) to form a vacuum adiabatic space.
It is arranged in a state of a continuous downward slope toward CM-NMR (1). The lower end portion of the shield gas supply / discharge pipe (28) is inserted into the inside from the upper opening of the liquid nitrogen injection passage (30) formed so as to communicate with the liquid nitrogen storage tank (3) of the SCM-NMR (1). The shield gas supply and exhaust pipe (2
8) The lower end of the liquid nitrogen injection passage (30) and the liquid nitrogen storage tank
It is located at the communication port with (3). The liquefied gas deriving system composed of the flexible heat insulating pipe (4) and the liquefied gas supply / discharge pipe (13) for cooling the reliquefaction tank (2) has its axis inclined at 15 degrees with respect to the horizontal line. It is arranged in an angled state.

【0015】また、図2に示すように、可撓性断熱管
(4)の外層管(29)は、その下端部の外径を小径に形成し
てあり、その小径部は液体窒素注入通路(30)の内径より
も僅かに小径に形成して、その小径部が液体窒素注入通
路(30)内に挿入できるようにしてある。一方可撓性断熱
管(4)の外層管(29)での外径は液体窒素注入通路(30)を
構成しているネック部の外径と等しく形成してあり、可
撓性断熱管(4)を液体窒素貯蔵槽(3)に接続した状態で
液体窒素注入通路(30)を構成しているネック部と外層管
外面との間を断熱継手(31)で接続するようにしてある。
Also, as shown in FIG.
The outer layer pipe (29) of (4) has an outer diameter formed at the lower end portion of a small diameter, and the small diameter portion is formed slightly smaller than the inner diameter of the liquid nitrogen injection passage (30). The part can be inserted into the liquid nitrogen injection passage (30). On the other hand, the outer diameter of the flexible heat insulating pipe (4) in the outer layer pipe (29) is formed to be equal to the outer diameter of the neck part constituting the liquid nitrogen injection passage (30). In a state in which the liquid nitrogen storage tank (3) is connected to the liquid nitrogen storage tank (3), the neck portion forming the liquid nitrogen injection passage (30) and the outer surface of the outer tube are connected by the heat insulating joint (31).

【0016】また、外層管(29)の小径部分の外周面には
電気絶縁被膜を形成して電気絶縁処理が施してある。こ
のように外層管(29)の小径部分の外周面に電気絶縁処理
を施しておくと、極低温冷凍機(6)の圧縮機(21)やコー
ルドヘッド(16)のロータリバルブ駆動モータの作動に起
因して生じる電気ノイズがSCM−NMR(1)等の理化
学機器に伝達されて、測定精度に影響を及ぼすことを抑
制できる。
Further, an electric insulating coating is formed on the outer peripheral surface of the small diameter portion of the outer tube (29), and the electric insulating treatment is performed. If the outer peripheral surface of the small-diameter portion of the outer tube (29) is subjected to electrical insulation treatment in this way, the operation of the compressor (21) of the cryogenic refrigerator (6) and the rotary valve drive motor of the cold head (16) can be performed. Can be suppressed from being transmitted to the physics and chemistry equipment such as SCM-NMR (1) and affecting measurement accuracy.

【0017】図3及び図4は、再液化槽(2)の配設姿勢
の変形例であり、図2に示すものは、再液化槽(2)の内
槽の軸心を垂直線に対して傾斜する状態に配置し、傾斜
している内槽底壁(32)の中央部から冷却用液化ガス給排
管(13)を水平面に対して傾斜する状態に連出したもので
ある。このように、再液化槽(2)を傾斜状に配置するこ
とにより、床面から再液化槽(2)の上端部までの高さを
抑制することができ、天井高の低い個所でも使用するこ
とが可能になる。
FIGS. 3 and 4 show a modification of the arrangement of the reliquefaction tank (2). FIG. 2 shows the reliquefaction tank (2) in which the axis of the inner tank of the reliquefaction tank (2) is perpendicular to the vertical line. The cooling liquefied gas supply / discharge pipe (13) extends continuously from the center of the inclined inner tank bottom wall (32) to the horizontal plane. Thus, by arranging the reliquefaction tank (2) in an inclined manner, the height from the floor surface to the upper end of the reliquefaction tank (2) can be suppressed, and the reliquefaction tank (2) can be used even in a place where the ceiling height is low. It becomes possible.

【0018】また、図3に示す実施形態では、支柱(10)
内にバッファタンク(33)を配置し、極低温冷凍機(6)の
コールドヘッド(16)から圧縮機ユニット(20)へのガス戻
し管(34)を接続させてある。このように圧縮機ユニット
(20)への低圧ガス返送路にバッファタンク(33)を介在さ
せた場合には、極低温冷凍機(6)としての効率が向上す
る。
In the embodiment shown in FIG. 3, the strut (10)
A buffer tank (33) is arranged in the inside, and a gas return pipe (34) from the cold head (16) of the cryogenic refrigerator (6) to the compressor unit (20) is connected. Thus the compressor unit
When the buffer tank (33) is interposed in the low pressure gas return path to (20), the efficiency as the cryogenic refrigerator (6) is improved.

【0019】図4に示すものは、極低温冷凍機(6)のコ
ールドヘッド(16)を再液化槽(2)の底部に配置したもの
で、冷却用液化ガス給排管(13)は内槽側壁での下端から
一定高さ上方の個所に開口している。
FIG. 4 shows an arrangement in which a cold head (16) of a cryogenic refrigerator (6) is disposed at the bottom of a reliquefaction tank (2), and a liquefied gas supply / discharge pipe (13) for cooling is provided inside. It is open at a certain height above the lower end of the tank side wall.

【0020】なお、上記各実施例では可撓性断熱管(4)
及び再液化槽(2)の冷却用液化ガス給排管(13)で構成さ
れている液化ガス導出系を水平線に対して15度の傾斜
角度で配置したが、この傾斜角度は15度〜60度の範
囲に設定することができる。液化ガス導出系の傾斜角度
が15度よりも小さい場合には、液化ガス導出系内を流
れる液の流下速度が遅くなり、液化ガス導出系内を上昇
移動するガスとの接触時間が増大して気化量も増えるこ
とになるから、液の円滑な返送が望めず、また、傾斜角
度を60度よりも大きな急角度とした場合には、液化ガ
ス導出系内でガスロック現象が発生して液体と気体との
円滑な入れ替わりが望めなくなる。
In each of the above embodiments, the flexible heat insulating pipe (4)
The liquefied gas outlet system constituted by the liquefied gas supply / discharge pipe (13) for cooling the reliquefaction tank (2) is arranged at an inclination angle of 15 degrees with respect to the horizontal line. Can be set in the range of degrees. If the inclination angle of the liquefied gas derivation system is smaller than 15 degrees, the flow speed of the liquid flowing in the liquefied gas derivation system becomes slow, and the contact time with the gas moving upward in the liquefied gas derivation system increases. Since the amount of vaporization also increases, smooth return of the liquid cannot be expected, and if the inclination angle is set to a steep angle larger than 60 degrees, a gas lock phenomenon occurs in the liquefied gas discharge system and the liquid Smooth exchange between gas and gas cannot be expected.

【0021】上述の構成からなる再液化装置では、SC
M−NMR(1)での液体窒素貯蔵槽(3)で気化した窒素
ガスは傾斜配管されている可撓性断熱管(4)を介して再
液化槽(2)に導出され、この再液化槽(2)内で極低温冷
凍機(6)の寒冷発生部(5)からの寒冷で再液化して再液
化槽(2)の底部に形成されている再液化ガス貯留部(14)
に貯溜され、この再液化ガス貯溜部(14)からオーバーフ
ローした再液化ガスが傾斜配管されている可撓性断熱管
(4)の底壁部分に沿って流下し、SCM−NMR(1)で
の液体窒素貯蔵槽(3)に返送されることになる。この結
果、SCM−NMR(1)での液体窒素の気化消散が抑制
されることになる。
In the reliquefaction apparatus having the above configuration, the SC
The nitrogen gas vaporized in the liquid nitrogen storage tank (3) in the M-NMR (1) is led out to the reliquefaction tank (2) through the flexible heat insulating pipe (4) which is inclined and piped, and this reliquefaction is performed. The re-liquefied gas storage part (14) formed in the bottom of the re-liquefaction tank (2) by being re-liquefied by cold from the cold generation part (5) of the cryogenic refrigerator (6) in the tank (2)
The flexible insulating pipe in which the reliquefied gas overflowing from the reliquefied gas storage part (14)
It flows down along the bottom wall of (4) and is returned to the liquid nitrogen storage tank (3) in SCM-NMR (1). As a result, the vaporization and dissipation of liquid nitrogen in SCM-NMR (1) is suppressed.

【0022】上記各実施例では、液化ガスを冷却冷媒と
して使用している理化学機器としてSCM−NMRにつ
いて説明したが、他の形式のNMRや電子顕微鏡等、液
化ガスの寒冷温度を冷却に利用している機器の冷媒液化
ガスの再液化に使用することかできる。また、検出機器
等の被冷却物を直接冷却する冷却用液化ガスの再液化に
も利用することができる。
In each of the above embodiments, SCM-NMR has been described as a physical and chemical instrument using a liquefied gas as a cooling refrigerant. However, other types of NMR and electron microscopes are used to cool the liquefied gas at a low temperature. Can be used for reliquefaction of the refrigerant liquefied gas of the equipment. Further, it can be used for reliquefaction of a liquefied gas for cooling that directly cools an object to be cooled such as a detection device.

【0023】[0023]

【発明の効果】本発明では、可撓性断熱管を構成してい
る断熱外層管の冷却用液化ガス槽側での端部を中間部分
での外径寸法よりも小径に形成して冷却用液化ガス槽の
冷媒液注入通路に突入するように形成してあるので、再
液化して冷却用液化ガス槽に戻される冷却用液化ガスが
冷却用液化ガス槽での冷媒液注入通路での温度勾配に影
響されることを抑制することができ、理化学機器での冷
却を安定して行うことができる。
According to the present invention, the end portion of the heat insulating outer layer tube constituting the flexible heat insulating tube on the side of the liquefied gas tank for cooling is formed to have a smaller diameter than the outer diameter of the intermediate portion. Since it is formed so as to protrude into the refrigerant liquid injection passage of the liquefied gas tank, the cooling liquefied gas which is reliquefied and returned to the cooling liquefied gas tank has a temperature in the refrigerant liquid injection passage in the liquefied gas tank for cooling. The influence of the gradient can be suppressed, and the cooling in the physics and chemistry equipment can be stably performed.

【0024】また、請求項2に記載したように断熱管の
冷媒液注入通路突入部分の外面を電気絶縁処理した場合
には、可撓性断熱管を介して伝達される電気ノイズが理
化学機器に伝導されることを抑制して、理化学機器とし
ての測定精度を向上させることができる。
Further, when the outer surface of the portion of the heat-insulating pipe protruding into the coolant liquid injection passage is electrically insulated as described in claim 2, electric noise transmitted through the flexible heat-insulating pipe is transmitted to the physics and chemical equipment. Conduction can be suppressed, and the measurement accuracy as a physicochemical instrument can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】SCM−NMRからの液体窒素を再液化する場
合での概略構成図である。
FIG. 1 is a schematic configuration diagram in a case where liquid nitrogen from SCM-NMR is reliquefied.

【図2】要部の拡大断面図である。FIG. 2 is an enlarged sectional view of a main part.

【図3】再液化槽の配置形態の変形例を示す拡大断面図
である。
FIG. 3 is an enlarged sectional view showing a modification of the arrangement of the reliquefaction tank.

【図4】再液化槽の配置形態の異なる変形例を示す拡大
断面図である。
FIG. 4 is an enlarged cross-sectional view showing a modified example in which the arrangement of the reliquefaction tank is different.

【符号の説明】[Explanation of symbols]

1…理化学機器、2…再液化槽、3…冷却用液化ガス
槽、4…可撓性断熱管、5…極低温冷凍機の寒冷発生
部、6…極低温冷凍機、10…支柱、13…冷却用液化ガス
給排管、29…可撓性断熱管の外層管、30…冷却用液化ガ
ス槽の冷媒液注入通路、32…再液化槽の底壁、33…バッ
フアタンク、34…極低温冷凍機(6)のガス戻し管。
DESCRIPTION OF SYMBOLS 1 ... Physicochemical equipment, 2 ... Reliquefaction tank, 3 ... Liquefied gas tank for cooling, 4 ... Flexible insulation tube, 5 ... Cold generation part of cryogenic refrigerator, 6 ... Cryogenic refrigerator, 10 ... Strut, 13 ... liquefied gas supply / discharge pipe for cooling, 29 ... outer pipe of flexible heat insulating pipe, 30 ... coolant liquid injection passage of liquefied gas tank for cooling, 32 ... bottom wall of reliquefaction tank, 33 ... buffer tank, 34 ... cryogenic Gas return pipe of refrigerator (6).

───────────────────────────────────────────────────── フロントページの続き (72)発明者 近藤 文五 滋賀県守山市勝部町1095番地 岩谷瓦斯 株式会社内 (72)発明者 川口 悦治 滋賀県守山市勝部町1095番地 岩谷瓦斯 株式会社内 (56)参考文献 特開 平8−327171(JP,A) 特開 昭60−73264(JP,A) 特開 昭63−140275(JP,A) (58)調査した分野(Int.Cl.7,DB名) F25B 9/00 F25D 3/10 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Bungo Kondo 1095 Katsube-cho, Moriyama-shi, Shiga Prefecture Iwatani Gas Co., Ltd. References JP-A-8-327171 (JP, A) JP-A-60-73264 (JP, A) JP-A-63-140275 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB Name) F25B 9/00 F25D 3/10

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 冷却冷媒としての液化ガスを利用してい
る理化学機器(1)の冷却用液化ガス槽(3)と、槽内を極
低温冷凍機(6)の寒冷発生部(5)で冷却するように構成
した再液化槽(2)とを冷却用液化ガス槽(3)に向かって
連続する下り傾斜に配置した可撓性断熱管(4)で連通接
続した冷却用液化ガスの再液化装置において、 可撓性断熱管(4)を構成している外層管(29)の冷却用液
化ガス槽(3)側での端部を中間部分での外径寸法よりも
小径に形成して冷却用液化ガス槽(3)の冷媒液注入通路
(30)に突入するように形成するとともに、可撓性断熱管
(4)を構成している冷却用液化ガス給排管(13)の冷却用
液化ガス槽(3)側での端部を冷却用液化ガス槽(3)の冷
媒液注入通路(30)の下端部分に位置させるように構成し
たことを特徴とする理化学機器冷却用液化ガスの再液化
装置。
1. A cooling liquefied gas tank (3) of a physics and chemistry equipment (1) using liquefied gas as a cooling refrigerant, and a cryogenic refrigerator (6) in a cryogenic refrigerator (6). The reliquefaction tank (2), which is configured to be cooled, is connected to a refrigerating gas tank (3) by a flexible insulated pipe (4) arranged continuously downward toward the liquefied gas tank (3). In the liquefaction apparatus, the end of the outer layer pipe (29) constituting the flexible heat insulating pipe (4) on the side of the liquefied gas tank for cooling (3) is formed to have a smaller diameter than the outer diameter of the middle part. Liquid injection passage for the liquefied gas tank for cooling (3)
(30) and a flexible insulation tube
The end of the cooling liquefied gas supply / discharge pipe (13), which constitutes (4), on the cooling liquefied gas tank (3) side is connected to the refrigerant liquid injection passage (30) of the cooling liquefied gas tank (3). A reliquefaction apparatus for a liquefied gas for cooling physics and chemistry equipment, wherein the apparatus is configured to be located at a lower end portion.
【請求項2】 可撓性断熱管(4)の外層管(29)の冷却用
液化ガス槽(3)の冷媒液注入通路(30)に突入する部分の
表面を電気絶縁処理した請求項1に記載の理化学機器冷
却用液化ガスの再液化装置。
2. A surface of a portion of the outer layer pipe (29) of the flexible heat insulating pipe (4) that enters the refrigerant liquid injection passage (30) of the liquefied gas tank for cooling (3) is electrically insulated. 4. The reliquefaction apparatus for a liquefied gas for cooling physics and chemistry equipment according to claim 1.
【請求項3】 再液化槽(2)を支柱(10)に支持させ、こ
の支柱(10)内にバッフアタンク(33)を形成し、バッファ
タンク(33)に極低温冷凍機(6)のガス戻し管(34)を接続
させた請求項1又は請求項2に記載の理化学機器冷却用
液化ガスの再液化装置。
3. The reliquefaction tank (2) is supported by a column (10), a buffer tank (33) is formed in the column (10), and the gas of the cryogenic refrigerator (6) is stored in the buffer tank (33). The reliquefaction apparatus for a liquefied gas for cooling physics and chemistry equipment according to claim 1 or 2, wherein a return pipe (34) is connected.
【請求項4】 再液化槽(2)の底壁(32)から可撓性断熱
管(4)の冷却用液化ガス給排管(13)を連出し、底壁(32)
が水平面に対して傾斜する状態に配置して冷却用液化ガ
ス給排管(13)の連出部が下側角部から一定高さに位置す
るように構成した請求項1、請求項2又は請求項3に記
載の理化学機器冷却用液化ガスの再液化装置。
4. A liquefied gas supply / discharge pipe (13) for cooling of a flexible heat insulating pipe (4) is continuously extended from a bottom wall (32) of the reliquefaction tank (2).
Is disposed so as to be inclined with respect to a horizontal plane, and the discharge portion of the liquefied gas supply / discharge pipe (13) for cooling is configured to be located at a fixed height from the lower corner portion. The reliquefaction apparatus for a liquefied gas for cooling physics and chemistry equipment according to claim 3.
【請求項5】 再液化槽(2)の底部に寒冷発生部(5)を
下から配置した請求項1、請求項2又は請求項3に記載
の理化学機器冷却用液化ガスの再液化装置。
5. A reliquefaction apparatus for a liquefied gas for cooling physics and chemistry equipment according to claim 1, wherein a cold generating part (5) is arranged from the bottom at the bottom of the reliquefaction tank (2).
JP5262997A 1997-03-07 1997-03-07 Reliquefaction equipment for liquefied gas for cooling of physics and chemistry equipment Expired - Fee Related JP3096969B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5262997A JP3096969B2 (en) 1997-03-07 1997-03-07 Reliquefaction equipment for liquefied gas for cooling of physics and chemistry equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5262997A JP3096969B2 (en) 1997-03-07 1997-03-07 Reliquefaction equipment for liquefied gas for cooling of physics and chemistry equipment

Publications (2)

Publication Number Publication Date
JPH10246547A JPH10246547A (en) 1998-09-14
JP3096969B2 true JP3096969B2 (en) 2000-10-10

Family

ID=12920122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5262997A Expired - Fee Related JP3096969B2 (en) 1997-03-07 1997-03-07 Reliquefaction equipment for liquefied gas for cooling of physics and chemistry equipment

Country Status (1)

Country Link
JP (1) JP3096969B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220045521A (en) * 2020-10-05 2022-04-12 한국기계연구원 Cryogenic fluid tank and cryogenic fluid supplying system having the same

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3883903B2 (en) * 2002-05-10 2007-02-21 住友重機械工業株式会社 Pulse tube refrigerator
JP2004028516A (en) * 2002-06-28 2004-01-29 Sanyo Electric Co Ltd Storage device
WO2005050104A1 (en) * 2003-11-21 2005-06-02 Mayekawa Mfg.Co.,Ltd. Ammonia/co2 refrigeration system, co2 brine production system for use therein, and ammonia cooing unit incorporating that production system
TWI325949B (en) 2004-02-09 2010-06-11 Sanyo Electric Co Refrigerant system
JP4736047B2 (en) * 2006-04-04 2011-07-27 学校法人金沢工業大学 Cooling system
JP5120648B2 (en) * 2008-11-07 2013-01-16 住友重機械工業株式会社 Cryogenic cooling device
JP5784517B2 (en) 2012-02-01 2015-09-24 住友重機械工業株式会社 Refrigerator mounting structure
JP5283096B2 (en) * 2012-03-09 2013-09-04 住友重機械工業株式会社 Cryogenic cooling device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220045521A (en) * 2020-10-05 2022-04-12 한국기계연구원 Cryogenic fluid tank and cryogenic fluid supplying system having the same
KR102430334B1 (en) * 2020-10-05 2022-08-08 한국기계연구원 Cryogenic fluid tank and cryogenic fluid supplying system having the same

Also Published As

Publication number Publication date
JPH10246547A (en) 1998-09-14

Similar Documents

Publication Publication Date Title
JP4031121B2 (en) Cryostat equipment
JPH10282200A (en) Cooler for superconducting magnet system
JPH11243007A (en) Superconducting magnet for magnetic resonance imaging
GB2457054A (en) Apparatus and method for controlling the cooling power of a cryogenic refrigerator delivered to a cryogen vessel
JP3096969B2 (en) Reliquefaction equipment for liquefied gas for cooling of physics and chemistry equipment
US20120167598A1 (en) Vacuum isolated multi-well zero loss helium dewar
JPH0653035A (en) Superconducting magnet
US5979176A (en) Refrigerator
JP3199967B2 (en) Cryogenic equipment
JPH06109821A (en) Measuring probe cooling device of squid fluxmeter
JP2007051850A (en) Liquid helium recondensation device and method for analytical superconductive magnet
JP2844433B2 (en) Reliquefaction equipment for liquefied gas for cooling of physics and chemistry equipment
JP3358053B2 (en) Liquid nitrogen recondenser
JPH1026427A (en) Cooler
JP5212981B2 (en) Cryogenic cooling device
JP2003086418A (en) Cryogenic device
JP2004116914A (en) Cooling pipe and cryogenic cryostat using it
JP3601946B2 (en) Reliquefaction equipment for liquefied gas for cooling of scientific equipment
JP2003303713A (en) Cryogenic device
JP3043009B1 (en) Liquid helium recovery / recondensing replenishment device
JP2909617B2 (en) Reliquefaction equipment for liquefied gas for cooling of physics and chemistry equipment
JP5442506B2 (en) Cooling device and recondensing device
JP2758514B2 (en) Cryogenic refrigeration equipment
JPH0645812Y2 (en) Cryogenic refrigerator
JP2910560B2 (en) Cryogenic equipment

Legal Events

Date Code Title Description
FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20070811

Year of fee payment: 7

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080811

Year of fee payment: 8

LAPS Cancellation because of no payment of annual fees