JPS62129677A - アルゴン精製装置 - Google Patents

アルゴン精製装置

Info

Publication number
JPS62129677A
JPS62129677A JP26929385A JP26929385A JPS62129677A JP S62129677 A JPS62129677 A JP S62129677A JP 26929385 A JP26929385 A JP 26929385A JP 26929385 A JP26929385 A JP 26929385A JP S62129677 A JPS62129677 A JP S62129677A
Authority
JP
Japan
Prior art keywords
raw material
argon
material gas
heat exchanger
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26929385A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0339235B2 (enrdf_load_stackoverflow
Inventor
茂雄 渡辺
染矢　芳夫
岡林　芳夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Techno Engineering Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Techno Engineering Co Ltd, Hitachi Ltd filed Critical Hitachi Techno Engineering Co Ltd
Priority to JP26929385A priority Critical patent/JPS62129677A/ja
Publication of JPS62129677A publication Critical patent/JPS62129677A/ja
Publication of JPH0339235B2 publication Critical patent/JPH0339235B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation By Low-Temperature Treatments (AREA)
JP26929385A 1985-12-02 1985-12-02 アルゴン精製装置 Granted JPS62129677A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26929385A JPS62129677A (ja) 1985-12-02 1985-12-02 アルゴン精製装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26929385A JPS62129677A (ja) 1985-12-02 1985-12-02 アルゴン精製装置

Publications (2)

Publication Number Publication Date
JPS62129677A true JPS62129677A (ja) 1987-06-11
JPH0339235B2 JPH0339235B2 (enrdf_load_stackoverflow) 1991-06-13

Family

ID=17470328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26929385A Granted JPS62129677A (ja) 1985-12-02 1985-12-02 アルゴン精製装置

Country Status (1)

Country Link
JP (1) JPS62129677A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0339235B2 (enrdf_load_stackoverflow) 1991-06-13

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