JPS62128420A - 走査電子顕微鏡 - Google Patents

走査電子顕微鏡

Info

Publication number
JPS62128420A
JPS62128420A JP60269005A JP26900585A JPS62128420A JP S62128420 A JPS62128420 A JP S62128420A JP 60269005 A JP60269005 A JP 60269005A JP 26900585 A JP26900585 A JP 26900585A JP S62128420 A JPS62128420 A JP S62128420A
Authority
JP
Japan
Prior art keywords
scanning
sample
electron beam
signal
analysis point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60269005A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0578898B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Uchiumi
内海　博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP60269005A priority Critical patent/JPS62128420A/ja
Publication of JPS62128420A publication Critical patent/JPS62128420A/ja
Publication of JPH0578898B2 publication Critical patent/JPH0578898B2/ja
Granted legal-status Critical Current

Links

JP60269005A 1985-11-29 1985-11-29 走査電子顕微鏡 Granted JPS62128420A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60269005A JPS62128420A (ja) 1985-11-29 1985-11-29 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60269005A JPS62128420A (ja) 1985-11-29 1985-11-29 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS62128420A true JPS62128420A (ja) 1987-06-10
JPH0578898B2 JPH0578898B2 (enrdf_load_stackoverflow) 1993-10-29

Family

ID=17466338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60269005A Granted JPS62128420A (ja) 1985-11-29 1985-11-29 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS62128420A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0578898B2 (enrdf_load_stackoverflow) 1993-10-29

Similar Documents

Publication Publication Date Title
US4091374A (en) Method for pictorially displaying output information generated by an object imaging apparatus
US4677351A (en) Circuit for preventing burn-in spots on the picture screen of a visual display
JP3494068B2 (ja) 荷電粒子線装置
US3942005A (en) Electron scanning apparatus
JP2611260B2 (ja) 試料像表示装置
JPS62128420A (ja) 走査電子顕微鏡
US4439681A (en) Charged particle beam scanning device
EP0737858A1 (en) Method and apparatus for adjusting electron-beam device
JPS59761B2 (ja) 走査電子顕微鏡における距離測定装置
JPH0343650Y2 (enrdf_load_stackoverflow)
JPS59148254A (ja) 走査電子顕微鏡等の試料移動装置
JPS6324617Y2 (enrdf_load_stackoverflow)
JPS63116348A (ja) 電子線装置の視野対応装置
JPH0425803Y2 (enrdf_load_stackoverflow)
JPS60138252U (ja) 粒子線装置における試料画像表示装置
JPH0238368Y2 (enrdf_load_stackoverflow)
JP2775812B2 (ja) 荷電粒子線装置
JP2838799B2 (ja) 荷電粒子線装置
JPH0334184B2 (enrdf_load_stackoverflow)
JPS5816591B2 (ja) 走査電子顕微鏡
JPH0132674Y2 (enrdf_load_stackoverflow)
KR830002861Y1 (ko) 주사전자 현미경 및 그의유사장치의 주사상 관찰장치
JPS62163247A (ja) 走査電子顕微鏡
JPH01186743A (ja) 電界放射型走査電子顕微鏡
JPS61200661A (ja) 走査電子顕微鏡