JPS6212658B2 - - Google Patents

Info

Publication number
JPS6212658B2
JPS6212658B2 JP54151852A JP15185279A JPS6212658B2 JP S6212658 B2 JPS6212658 B2 JP S6212658B2 JP 54151852 A JP54151852 A JP 54151852A JP 15185279 A JP15185279 A JP 15185279A JP S6212658 B2 JPS6212658 B2 JP S6212658B2
Authority
JP
Japan
Prior art keywords
insulating layer
substrate
concentration
layer
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54151852A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5674929A (en
Inventor
Takayoshi Hayashi
Hamao Okamoto
Yoshikazu Pponma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP15185279A priority Critical patent/JPS5674929A/ja
Publication of JPS5674929A publication Critical patent/JPS5674929A/ja
Publication of JPS6212658B2 publication Critical patent/JPS6212658B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
JP15185279A 1979-11-22 1979-11-22 Insulating layer forming method Granted JPS5674929A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15185279A JPS5674929A (en) 1979-11-22 1979-11-22 Insulating layer forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15185279A JPS5674929A (en) 1979-11-22 1979-11-22 Insulating layer forming method

Publications (2)

Publication Number Publication Date
JPS5674929A JPS5674929A (en) 1981-06-20
JPS6212658B2 true JPS6212658B2 (enrdf_load_stackoverflow) 1987-03-19

Family

ID=15527668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15185279A Granted JPS5674929A (en) 1979-11-22 1979-11-22 Insulating layer forming method

Country Status (1)

Country Link
JP (1) JPS5674929A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5918151A (en) * 1993-12-28 1999-06-29 Nippon Steel Corporation Method of manufacturing a semiconductor substrate and an apparatus for manufacturing the same
KR102482185B1 (ko) 2022-09-15 2022-12-29 (주)코리아테크 스틱형 용기
KR102484068B1 (ko) 2021-10-22 2023-01-04 (주)코리아테크 스틱형 용기

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5918151A (en) * 1993-12-28 1999-06-29 Nippon Steel Corporation Method of manufacturing a semiconductor substrate and an apparatus for manufacturing the same
KR102484068B1 (ko) 2021-10-22 2023-01-04 (주)코리아테크 스틱형 용기
KR102482185B1 (ko) 2022-09-15 2022-12-29 (주)코리아테크 스틱형 용기
KR102517535B1 (ko) 2022-09-15 2023-04-05 (주)코리아테크 스틱형 용기

Also Published As

Publication number Publication date
JPS5674929A (en) 1981-06-20

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