JPS62124860A - 光学式異物検出装置 - Google Patents

光学式異物検出装置

Info

Publication number
JPS62124860A
JPS62124860A JP60262505A JP26250585A JPS62124860A JP S62124860 A JPS62124860 A JP S62124860A JP 60262505 A JP60262505 A JP 60262505A JP 26250585 A JP26250585 A JP 26250585A JP S62124860 A JPS62124860 A JP S62124860A
Authority
JP
Japan
Prior art keywords
mirror
foreign
foreign object
optical
rotating mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60262505A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0457463B2 (enrdf_load_stackoverflow
Inventor
Tadao Totsuka
戸塚　忠男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP60262505A priority Critical patent/JPS62124860A/ja
Publication of JPS62124860A publication Critical patent/JPS62124860A/ja
Publication of JPH0457463B2 publication Critical patent/JPH0457463B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Machine Tool Sensing Apparatuses (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
JP60262505A 1985-11-25 1985-11-25 光学式異物検出装置 Granted JPS62124860A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60262505A JPS62124860A (ja) 1985-11-25 1985-11-25 光学式異物検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60262505A JPS62124860A (ja) 1985-11-25 1985-11-25 光学式異物検出装置

Publications (2)

Publication Number Publication Date
JPS62124860A true JPS62124860A (ja) 1987-06-06
JPH0457463B2 JPH0457463B2 (enrdf_load_stackoverflow) 1992-09-11

Family

ID=17376733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60262505A Granted JPS62124860A (ja) 1985-11-25 1985-11-25 光学式異物検出装置

Country Status (1)

Country Link
JP (1) JPS62124860A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0457463B2 (enrdf_load_stackoverflow) 1992-09-11

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