JPS62124272A - 導電性炭素膜の形成方法 - Google Patents

導電性炭素膜の形成方法

Info

Publication number
JPS62124272A
JPS62124272A JP60261382A JP26138285A JPS62124272A JP S62124272 A JPS62124272 A JP S62124272A JP 60261382 A JP60261382 A JP 60261382A JP 26138285 A JP26138285 A JP 26138285A JP S62124272 A JPS62124272 A JP S62124272A
Authority
JP
Japan
Prior art keywords
carbon film
substrate
conductive carbon
electrically conductive
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60261382A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6248754B2 (enrdf_load_stackoverflow
Inventor
Jun Shiotani
塩谷　準
Yoichi Yamaguchi
洋一 山口
Hironaga Matsubara
松原　宏長
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60261382A priority Critical patent/JPS62124272A/ja
Publication of JPS62124272A publication Critical patent/JPS62124272A/ja
Publication of JPS6248754B2 publication Critical patent/JPS6248754B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Conductive Materials (AREA)
  • Carbon And Carbon Compounds (AREA)
JP60261382A 1985-11-22 1985-11-22 導電性炭素膜の形成方法 Granted JPS62124272A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60261382A JPS62124272A (ja) 1985-11-22 1985-11-22 導電性炭素膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60261382A JPS62124272A (ja) 1985-11-22 1985-11-22 導電性炭素膜の形成方法

Publications (2)

Publication Number Publication Date
JPS62124272A true JPS62124272A (ja) 1987-06-05
JPS6248754B2 JPS6248754B2 (enrdf_load_stackoverflow) 1987-10-15

Family

ID=17361070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60261382A Granted JPS62124272A (ja) 1985-11-22 1985-11-22 導電性炭素膜の形成方法

Country Status (1)

Country Link
JP (1) JPS62124272A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63293164A (ja) * 1987-05-27 1988-11-30 Agency Of Ind Science & Technol 炭素材料の製造法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6455542U (enrdf_load_stackoverflow) * 1987-09-30 1989-04-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63293164A (ja) * 1987-05-27 1988-11-30 Agency Of Ind Science & Technol 炭素材料の製造法

Also Published As

Publication number Publication date
JPS6248754B2 (enrdf_load_stackoverflow) 1987-10-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term