JPS62123650U - - Google Patents
Info
- Publication number
- JPS62123650U JPS62123650U JP1986008852U JP885286U JPS62123650U JP S62123650 U JPS62123650 U JP S62123650U JP 1986008852 U JP1986008852 U JP 1986008852U JP 885286 U JP885286 U JP 885286U JP S62123650 U JPS62123650 U JP S62123650U
- Authority
- JP
- Japan
- Prior art keywords
- mask
- holding
- pin
- shaped groove
- cross
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は本考案の一実施例の説明図、第２図は
従来例の説明図である。
１０…ステージチヤツク台、１０ａ…十字形の
溝部、２０…マスク保持用ピン、２０ａ…マスク
保持部、２０ｂ…横溝、３０…中心軸ピン、４０
…バネ手段、５０…ガラスマスク。
FIG. 1 is an explanatory diagram of an embodiment of the present invention, and FIG. 2 is an explanatory diagram of a conventional example. DESCRIPTION OF SYMBOLS 10... Stage chuck stand, 10a... Cross-shaped groove, 20... Mask holding pin, 20a... Mask holding part, 20b... Horizontal groove, 30... Center axis pin, 40
...Spring means, 50...Glass mask.
Claims (1)
浄処理するマスク洗浄装置において、上面部に十
字形の溝部が設けられると共に、その中心部に中
心軸ピンが配設されたステージチヤツク台と、上
端部にガラスマスクを保持するマスク保持部が設
けられると共に、上記十字形の溝部内を夫々スラ
イド移動するマスク保持用ピンと、上記中心軸ピ
ンと上記マスク保持用ピンとを夫々連結するバネ
手段とを含んで構成される事を特徴とするマスク
洗浄装置。 A mask cleaning device that cleans a glass mask by rotating it in a cleaning tank includes a stage chuck stand that is provided with a cross-shaped groove on its top surface and a central shaft pin in its center; A mask holding portion for holding a glass mask is provided in the portion, and includes mask holding pins that slide within the cross-shaped groove portions, and spring means that connects the center axis pin and the mask holding pin, respectively. A mask cleaning device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986008852U JPS62123650U (en) | 1986-01-27 | 1986-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986008852U JPS62123650U (en) | 1986-01-27 | 1986-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62123650U true JPS62123650U (en) | 1987-08-06 |
Family
ID=30793618
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986008852U Pending JPS62123650U (en) | 1986-01-27 | 1986-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62123650U (en) |
-
1986
- 1986-01-27 JP JP1986008852U patent/JPS62123650U/ja active Pending
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