JPS621230Y2 - - Google Patents

Info

Publication number
JPS621230Y2
JPS621230Y2 JP1981193038U JP19303881U JPS621230Y2 JP S621230 Y2 JPS621230 Y2 JP S621230Y2 JP 1981193038 U JP1981193038 U JP 1981193038U JP 19303881 U JP19303881 U JP 19303881U JP S621230 Y2 JPS621230 Y2 JP S621230Y2
Authority
JP
Japan
Prior art keywords
target
thin film
light
sputtering
transparent substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981193038U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58101874U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19303881U priority Critical patent/JPS58101874U/ja
Publication of JPS58101874U publication Critical patent/JPS58101874U/ja
Application granted granted Critical
Publication of JPS621230Y2 publication Critical patent/JPS621230Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP19303881U 1981-12-28 1981-12-28 マグネトロン式スパツタ装置 Granted JPS58101874U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19303881U JPS58101874U (ja) 1981-12-28 1981-12-28 マグネトロン式スパツタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19303881U JPS58101874U (ja) 1981-12-28 1981-12-28 マグネトロン式スパツタ装置

Publications (2)

Publication Number Publication Date
JPS58101874U JPS58101874U (ja) 1983-07-11
JPS621230Y2 true JPS621230Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-13

Family

ID=30106412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19303881U Granted JPS58101874U (ja) 1981-12-28 1981-12-28 マグネトロン式スパツタ装置

Country Status (1)

Country Link
JP (1) JPS58101874U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56151364U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1980-04-10 1981-11-13

Also Published As

Publication number Publication date
JPS58101874U (ja) 1983-07-11

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