JPS6212307B2 - - Google Patents

Info

Publication number
JPS6212307B2
JPS6212307B2 JP3230379A JP3230379A JPS6212307B2 JP S6212307 B2 JPS6212307 B2 JP S6212307B2 JP 3230379 A JP3230379 A JP 3230379A JP 3230379 A JP3230379 A JP 3230379A JP S6212307 B2 JPS6212307 B2 JP S6212307B2
Authority
JP
Japan
Prior art keywords
thickness
grooves
damping
minute
ability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3230379A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55125272A (en
Inventor
Toshinori Ozaki
Hideo Nakae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3230379A priority Critical patent/JPS55125272A/ja
Publication of JPS55125272A publication Critical patent/JPS55125272A/ja
Publication of JPS6212307B2 publication Critical patent/JPS6212307B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP3230379A 1979-03-22 1979-03-22 Manufacture of micro-part having damping capacity Granted JPS55125272A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3230379A JPS55125272A (en) 1979-03-22 1979-03-22 Manufacture of micro-part having damping capacity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3230379A JPS55125272A (en) 1979-03-22 1979-03-22 Manufacture of micro-part having damping capacity

Publications (2)

Publication Number Publication Date
JPS55125272A JPS55125272A (en) 1980-09-26
JPS6212307B2 true JPS6212307B2 (enrdf_load_stackoverflow) 1987-03-18

Family

ID=12355172

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3230379A Granted JPS55125272A (en) 1979-03-22 1979-03-22 Manufacture of micro-part having damping capacity

Country Status (1)

Country Link
JP (1) JPS55125272A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS55125272A (en) 1980-09-26

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