JPS62122342U - - Google Patents
Info
- Publication number
- JPS62122342U JPS62122342U JP1986008851U JP885186U JPS62122342U JP S62122342 U JPS62122342 U JP S62122342U JP 1986008851 U JP1986008851 U JP 1986008851U JP 885186 U JP885186 U JP 885186U JP S62122342 U JPS62122342 U JP S62122342U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- size
- semiconductor integrated
- pattern
- masking frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000873 masking effect Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986008851U JPS62122342U (pt) | 1986-01-27 | 1986-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986008851U JPS62122342U (pt) | 1986-01-27 | 1986-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62122342U true JPS62122342U (pt) | 1987-08-03 |
Family
ID=30793616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986008851U Pending JPS62122342U (pt) | 1986-01-27 | 1986-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62122342U (pt) |
-
1986
- 1986-01-27 JP JP1986008851U patent/JPS62122342U/ja active Pending
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