JPS62122337U - - Google Patents
Info
- Publication number
- JPS62122337U JPS62122337U JP18825486U JP18825486U JPS62122337U JP S62122337 U JPS62122337 U JP S62122337U JP 18825486 U JP18825486 U JP 18825486U JP 18825486 U JP18825486 U JP 18825486U JP S62122337 U JPS62122337 U JP S62122337U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- polishing cloth
- substrate
- reciprocates
- rotating roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims 5
- 239000004744 fabric Substances 0.000 claims 4
- 238000005498 polishing Methods 0.000 claims 4
- 238000004804 winding Methods 0.000 claims 1
- 238000005201 scrubbing Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18825486U JPS62122337U (th) | 1986-12-04 | 1986-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18825486U JPS62122337U (th) | 1986-12-04 | 1986-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62122337U true JPS62122337U (th) | 1987-08-03 |
Family
ID=31139447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18825486U Pending JPS62122337U (th) | 1986-12-04 | 1986-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62122337U (th) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216163A (en) * | 1975-07-30 | 1977-02-07 | Hitachi Ltd | Waste removal method |
| JPS558414B2 (th) * | 1977-09-30 | 1980-03-04 |
-
1986
- 1986-12-04 JP JP18825486U patent/JPS62122337U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216163A (en) * | 1975-07-30 | 1977-02-07 | Hitachi Ltd | Waste removal method |
| JPS558414B2 (th) * | 1977-09-30 | 1980-03-04 |
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