JPH01118436U - - Google Patents
Info
- Publication number
- JPH01118436U JPH01118436U JP1415488U JP1415488U JPH01118436U JP H01118436 U JPH01118436 U JP H01118436U JP 1415488 U JP1415488 U JP 1415488U JP 1415488 U JP1415488 U JP 1415488U JP H01118436 U JPH01118436 U JP H01118436U
- Authority
- JP
- Japan
- Prior art keywords
- drying
- semiconductor wafer
- cleaning
- wafer cleaning
- cleans
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000007921 spray Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1415488U JPH01118436U (th) | 1988-02-04 | 1988-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1415488U JPH01118436U (th) | 1988-02-04 | 1988-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01118436U true JPH01118436U (th) | 1989-08-10 |
Family
ID=31225100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1415488U Pending JPH01118436U (th) | 1988-02-04 | 1988-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01118436U (th) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0497525A (ja) * | 1990-08-16 | 1992-03-30 | Nec Yamagata Ltd | ウェーハ処理装置 |
-
1988
- 1988-02-04 JP JP1415488U patent/JPH01118436U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0497525A (ja) * | 1990-08-16 | 1992-03-30 | Nec Yamagata Ltd | ウェーハ処理装置 |