JPS6211965B2 - - Google Patents

Info

Publication number
JPS6211965B2
JPS6211965B2 JP54145468A JP14546879A JPS6211965B2 JP S6211965 B2 JPS6211965 B2 JP S6211965B2 JP 54145468 A JP54145468 A JP 54145468A JP 14546879 A JP14546879 A JP 14546879A JP S6211965 B2 JPS6211965 B2 JP S6211965B2
Authority
JP
Japan
Prior art keywords
machining
elastic body
discharge
machining fluid
polishing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54145468A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5669070A (en
Inventor
Kyoshi Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inoue Japax Research Inc
Original Assignee
Inoue Japax Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inoue Japax Research Inc filed Critical Inoue Japax Research Inc
Priority to JP14546879A priority Critical patent/JPS5669070A/ja
Publication of JPS5669070A publication Critical patent/JPS5669070A/ja
Publication of JPS6211965B2 publication Critical patent/JPS6211965B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
JP14546879A 1979-11-12 1979-11-12 Electrolytic polishing apparatus Granted JPS5669070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14546879A JPS5669070A (en) 1979-11-12 1979-11-12 Electrolytic polishing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14546879A JPS5669070A (en) 1979-11-12 1979-11-12 Electrolytic polishing apparatus

Publications (2)

Publication Number Publication Date
JPS5669070A JPS5669070A (en) 1981-06-10
JPS6211965B2 true JPS6211965B2 (OSRAM) 1987-03-16

Family

ID=15385929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14546879A Granted JPS5669070A (en) 1979-11-12 1979-11-12 Electrolytic polishing apparatus

Country Status (1)

Country Link
JP (1) JPS5669070A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6811680B2 (en) * 2001-03-14 2004-11-02 Applied Materials Inc. Planarization of substrates using electrochemical mechanical polishing
GB202107777D0 (en) * 2021-06-01 2021-07-14 Univ College Dublin Nat Univ Ireland Dublin Hybrid polishing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5747428B2 (OSRAM) * 1973-07-20 1982-10-08

Also Published As

Publication number Publication date
JPS5669070A (en) 1981-06-10

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