JPS5669070A - Electrolytic polishing apparatus - Google Patents
Electrolytic polishing apparatusInfo
- Publication number
- JPS5669070A JPS5669070A JP14546879A JP14546879A JPS5669070A JP S5669070 A JPS5669070 A JP S5669070A JP 14546879 A JP14546879 A JP 14546879A JP 14546879 A JP14546879 A JP 14546879A JP S5669070 A JPS5669070 A JP S5669070A
- Authority
- JP
- Japan
- Prior art keywords
- cavity
- working fluid
- abrasive
- elastic substance
- worked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
PURPOSE: To improve electrolytic polishing in efficiency by covering the cavity to be finished with an elastic substance and moving the abrasive-containing working fluid sealed in the cavity in order to allow the abrasive to remove the oxide film on the surface being finished.
CONSTITUTION: An object 2 to be worked is secured on a table 1. An elastic substance 4 is arranged so as to cover the cavity to be worked, and closely secured by a fixing member 6. The sealed cavity is filled with working fluid containing abrasive supplied from a working fluid regulating tank 1 by a pump 12 through a supply pipe 9 having a check valve 11 and a supply passage 7. Then a surface 5 is electrolytically polished by using a flexible electrode as a cathode and the object 2 as an anode. On doing this, the reciprocating motion of a pressure substance 19 causes the elastic substance 4 to be pressed downwards, and consequently the working fluid cyclically moves in the cavity. The movement permits the oxide film to be removed and exhausted through an exhaust passage 8.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14546879A JPS5669070A (en) | 1979-11-12 | 1979-11-12 | Electrolytic polishing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14546879A JPS5669070A (en) | 1979-11-12 | 1979-11-12 | Electrolytic polishing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5669070A true JPS5669070A (en) | 1981-06-10 |
| JPS6211965B2 JPS6211965B2 (en) | 1987-03-16 |
Family
ID=15385929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14546879A Granted JPS5669070A (en) | 1979-11-12 | 1979-11-12 | Electrolytic polishing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5669070A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005508074A (en) * | 2001-03-14 | 2005-03-24 | アプライド マテリアルズ インコーポレイテッド | Substrate planarization using electrolytic chemical mechanical polishing |
| WO2022253927A1 (en) * | 2021-06-01 | 2022-12-08 | University College Dublin, National University Of Ireland, Dublin | Hybrid electrochemical and abrasive fluid polishing |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5031866A (en) * | 1973-07-20 | 1975-03-28 |
-
1979
- 1979-11-12 JP JP14546879A patent/JPS5669070A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5031866A (en) * | 1973-07-20 | 1975-03-28 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005508074A (en) * | 2001-03-14 | 2005-03-24 | アプライド マテリアルズ インコーポレイテッド | Substrate planarization using electrolytic chemical mechanical polishing |
| WO2022253927A1 (en) * | 2021-06-01 | 2022-12-08 | University College Dublin, National University Of Ireland, Dublin | Hybrid electrochemical and abrasive fluid polishing |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6211965B2 (en) | 1987-03-16 |
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