JPS62118519U - - Google Patents
Info
- Publication number
- JPS62118519U JPS62118519U JP530186U JP530186U JPS62118519U JP S62118519 U JPS62118519 U JP S62118519U JP 530186 U JP530186 U JP 530186U JP 530186 U JP530186 U JP 530186U JP S62118519 U JPS62118519 U JP S62118519U
- Authority
- JP
- Japan
- Prior art keywords
- photo
- pressure oil
- vapor pressure
- low vapor
- cvd apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012495 reaction gas Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP530186U JPH0342038Y2 (https=) | 1986-01-17 | 1986-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP530186U JPH0342038Y2 (https=) | 1986-01-17 | 1986-01-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62118519U true JPS62118519U (https=) | 1987-07-28 |
| JPH0342038Y2 JPH0342038Y2 (https=) | 1991-09-03 |
Family
ID=30786755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP530186U Expired JPH0342038Y2 (https=) | 1986-01-17 | 1986-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0342038Y2 (https=) |
-
1986
- 1986-01-17 JP JP530186U patent/JPH0342038Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0342038Y2 (https=) | 1991-09-03 |
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