JPS62116751A - 硬質非晶質炭素膜 - Google Patents

硬質非晶質炭素膜

Info

Publication number
JPS62116751A
JPS62116751A JP60255268A JP25526885A JPS62116751A JP S62116751 A JPS62116751 A JP S62116751A JP 60255268 A JP60255268 A JP 60255268A JP 25526885 A JP25526885 A JP 25526885A JP S62116751 A JPS62116751 A JP S62116751A
Authority
JP
Japan
Prior art keywords
carbon film
electrode
amorphous carbon
substrate
screen mesh
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60255268A
Other languages
English (en)
Japanese (ja)
Other versions
JPH049870B2 (cs
Inventor
Kazutaka Fujii
和隆 藤井
Nobuaki Shohata
伸明 正畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60255268A priority Critical patent/JPS62116751A/ja
Publication of JPS62116751A publication Critical patent/JPS62116751A/ja
Publication of JPH049870B2 publication Critical patent/JPH049870B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
JP60255268A 1985-11-13 1985-11-13 硬質非晶質炭素膜 Granted JPS62116751A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60255268A JPS62116751A (ja) 1985-11-13 1985-11-13 硬質非晶質炭素膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60255268A JPS62116751A (ja) 1985-11-13 1985-11-13 硬質非晶質炭素膜

Publications (2)

Publication Number Publication Date
JPS62116751A true JPS62116751A (ja) 1987-05-28
JPH049870B2 JPH049870B2 (cs) 1992-02-21

Family

ID=17276386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60255268A Granted JPS62116751A (ja) 1985-11-13 1985-11-13 硬質非晶質炭素膜

Country Status (1)

Country Link
JP (1) JPS62116751A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020045900A (ja) * 2018-09-19 2020-03-26 ユナイテッド テクノロジーズ コーポレイションＵｎｉｔｅｄ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｃｏｒｐｏｒａｔｉｏｎ ガスタービンエンジン用のシールアセンブリ、ガスタービンエンジン、およびシールアセンブリの作成方法
US11603591B2 (en) * 2018-05-03 2023-03-14 Applied Materials Inc. Pulsed plasma (DC/RF) deposition of high quality C films for patterning

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11603591B2 (en) * 2018-05-03 2023-03-14 Applied Materials Inc. Pulsed plasma (DC/RF) deposition of high quality C films for patterning
JP2020045900A (ja) * 2018-09-19 2020-03-26 ユナイテッド テクノロジーズ コーポレイションＵｎｉｔｅｄ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｃｏｒｐｏｒａｔｉｏｎ ガスタービンエンジン用のシールアセンブリ、ガスタービンエンジン、およびシールアセンブリの作成方法

Also Published As

Publication number Publication date
JPH049870B2 (cs) 1992-02-21

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