JPS6211502B2 - - Google Patents
Info
- Publication number
- JPS6211502B2 JPS6211502B2 JP56129682A JP12968281A JPS6211502B2 JP S6211502 B2 JPS6211502 B2 JP S6211502B2 JP 56129682 A JP56129682 A JP 56129682A JP 12968281 A JP12968281 A JP 12968281A JP S6211502 B2 JPS6211502 B2 JP S6211502B2
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- pellets
- camera
- flexible sheet
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12968281A JPS5831551A (ja) | 1981-08-19 | 1981-08-19 | ペレツト位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12968281A JPS5831551A (ja) | 1981-08-19 | 1981-08-19 | ペレツト位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5831551A JPS5831551A (ja) | 1983-02-24 |
| JPS6211502B2 true JPS6211502B2 (enrdf_load_stackoverflow) | 1987-03-12 |
Family
ID=15015562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12968281A Granted JPS5831551A (ja) | 1981-08-19 | 1981-08-19 | ペレツト位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5831551A (enrdf_load_stackoverflow) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53160368U (enrdf_load_stackoverflow) * | 1977-05-23 | 1978-12-15 | ||
| JPS57115242U (enrdf_load_stackoverflow) * | 1981-01-07 | 1982-07-16 |
-
1981
- 1981-08-19 JP JP12968281A patent/JPS5831551A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5831551A (ja) | 1983-02-24 |
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