JPS6211243Y2 - - Google Patents
Info
- Publication number
- JPS6211243Y2 JPS6211243Y2 JP1980131894U JP13189480U JPS6211243Y2 JP S6211243 Y2 JPS6211243 Y2 JP S6211243Y2 JP 1980131894 U JP1980131894 U JP 1980131894U JP 13189480 U JP13189480 U JP 13189480U JP S6211243 Y2 JPS6211243 Y2 JP S6211243Y2
- Authority
- JP
- Japan
- Prior art keywords
- hydraulic pressure
- valve
- piston
- valve piston
- stepped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000000903 blocking effect Effects 0.000 claims 1
- 230000002401 inhibitory effect Effects 0.000 claims 1
- 230000007423 decrease Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980131894U JPS6211243Y2 (US20040232935A1-20041125-M00002.png) | 1980-09-17 | 1980-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980131894U JPS6211243Y2 (US20040232935A1-20041125-M00002.png) | 1980-09-17 | 1980-09-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5755655U JPS5755655U (US20040232935A1-20041125-M00002.png) | 1982-04-01 |
| JPS6211243Y2 true JPS6211243Y2 (US20040232935A1-20041125-M00002.png) | 1987-03-17 |
Family
ID=29492159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980131894U Expired JPS6211243Y2 (US20040232935A1-20041125-M00002.png) | 1980-09-17 | 1980-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6211243Y2 (US20040232935A1-20041125-M00002.png) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7138813B2 (en) | 1999-06-30 | 2006-11-21 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
| US7355420B2 (en) | 2001-08-21 | 2008-04-08 | Cascade Microtech, Inc. | Membrane probing system |
| US7420381B2 (en) | 2004-09-13 | 2008-09-02 | Cascade Microtech, Inc. | Double sided probing structures |
| US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US9429638B2 (en) | 2008-11-21 | 2016-08-30 | Cascade Microtech, Inc. | Method of replacing an existing contact of a wafer probing assembly |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4915193A (US20040232935A1-20041125-M00002.png) * | 1972-06-05 | 1974-02-09 |
-
1980
- 1980-09-17 JP JP1980131894U patent/JPS6211243Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4915193A (US20040232935A1-20041125-M00002.png) * | 1972-06-05 | 1974-02-09 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7138813B2 (en) | 1999-06-30 | 2006-11-21 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
| US7355420B2 (en) | 2001-08-21 | 2008-04-08 | Cascade Microtech, Inc. | Membrane probing system |
| US7492175B2 (en) | 2001-08-21 | 2009-02-17 | Cascade Microtech, Inc. | Membrane probing system |
| US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7876115B2 (en) | 2003-05-23 | 2011-01-25 | Cascade Microtech, Inc. | Chuck for holding a device under test |
| US7420381B2 (en) | 2004-09-13 | 2008-09-02 | Cascade Microtech, Inc. | Double sided probing structures |
| US8013623B2 (en) | 2004-09-13 | 2011-09-06 | Cascade Microtech, Inc. | Double sided probing structures |
| US9429638B2 (en) | 2008-11-21 | 2016-08-30 | Cascade Microtech, Inc. | Method of replacing an existing contact of a wafer probing assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5755655U (US20040232935A1-20041125-M00002.png) | 1982-04-01 |
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